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Device and method for forming surface coating with adoption of grid control and plasma-initiated gas-phase polymerization

A plasma and gas phase polymerization technology, applied in the field of plasma, can solve the problems that the plasma action time cannot be shorter than tens of microseconds, plasma instability, complex power supply structure, etc., and achieve simple structure, easy debugging, long action time shortened effect

Active Publication Date: 2016-09-21
JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a device and method for initiating gas-phase polymerization surface coating by gate-controlled plasma, so as to solve the problem of complex power supply structure, high price and difficulty in debugging in the prior art; unstable plasma; plasma action time The problem that cannot be shorter than tens of microseconds

Method used

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  • Device and method for forming surface coating with adoption of grid control and plasma-initiated gas-phase polymerization

Examples

Experimental program
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Effect test

Embodiment 1

[0025] like figure 1 Shown is a device for gate-controlled plasma-induced gas-phase polymerization surface coating. The metal grid 1 separates the vacuum chamber into two parts, the discharge chamber 2 and the processing chamber 3. The metal grid 1 is made of ordinary steel wire weaving, and the metal grid The wire diameter of the net is 0.5mm, and the mesh size is 1mm; the metal grid 1 is connected to the pulse bias power supply 10, and the metal grid 1 is insulated from the vacuum chamber; the discharge chamber 2 is respectively connected to the carrier gas pipeline 4 and the filament electrode 9, and the filament The electrode 9 is connected to the power source 8; the side of the treatment chamber 3 that can place the base material to be treated away from the discharge chamber 2 is connected to one end of the exhaust pipe 6, and the other end of the exhaust pipe 6 is connected to the vacuum pump 7, and the side of the treatment chamber 3 is close to the discharge chamber. O...

Embodiment 2

[0027] A kind of method that utilizes the device described in embodiment 1 to initiate gas phase polymerization surface coating to initiate gas phase polymerization surface coating, comprising the following steps:

[0028] 1) placing the substrate to be processed in the processing chamber 3;

[0029] 2) The carrier gas and monomer vapor are sent into the discharge chamber 2 and the processing chamber 3 through the carrier gas pipeline 4 and the monomer steam pipeline 5 respectively, and at the same time, the power supply 8 heats the filament electrode 9 and provides a high voltage, which is generated in the discharge chamber 2 Continuous glow discharge, the pulse positive bias generated by the pulse bias power supply 10 is applied to the metal grid;

[0030] 3) A stable plasma with continuous discharge is generated in the discharge chamber 2, and the metal grid 1 is automatically at the floating potential of the plasma during the period when the pulse positive bias is turned o...

Embodiment 3

[0041] The structure and connection relationship of each part of a device for gate-controlled plasma-induced gas-phase polymerization surface coating described in this embodiment are the same as those in Example 1, and the different technical parameters are:

[0042] 1) The metal grid 1 is made of nickel wire weaving;

[0043]2) The wire diameter of the metal grid is 0.02mm, and the mesh size is 0.1mm.

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Abstract

The invention discloses a device and a method for forming a surface coating with adoption of grid control and plasma-initiated gas-phase polymerization, and belongs to the technical field of plasma. The device and the method are used for preparing the polymer coating on the surface of a substrate. The method is characterized in that a vacuum chamber is divided into a discharging cavity and a processing chamber by a metal grid mesh; the metal grid mesh is insulated from the vacuum chamber; carrier gas and monomer steam are fed into the discharging cavity and the processing chamber through different pipes respectively; a to-be-processed substrate is put into the processing chamber; continuous discharging plasma is generated in the discharging cavity, pulse positive bias is applied to the metal grid mesh, and the plasma is released to enter the processing cavity to initiate monomer polymerization. The method has advantages that the power supply structure is stable, the price is low, debugging is easy, the plasma is stable, the acting time of the plasma can be shortened to the microsecond level, and the like.

Description

technical field [0001] The invention belongs to the field of plasma technology, and relates to a device and method for grid-controlled plasma-initiated polymerization surface coatings for preparing polymer coatings on the surface of substrates. Background technique [0002] Plasma polymerization is a method in which organic gaseous monomers are plasmaized by discharge to produce various active species, and polymers are formed by addition reactions between these active species or between active species and monomers. Plasma polymerization can be divided into two forms: plasma state polymerization and plasma induced polymerization. The plasma formed by glow discharge causes the monomer vapor to undergo a gas-phase reaction to generate active centers, which triggers the polymerization reaction of the monomer vapor in the follow-up process without plasma for a long time. Compared with the problems of complex structure, poor reaction reproducibility, and decay of treatment effect...

Claims

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Application Information

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IPC IPC(8): C09D4/00C09D4/02C08F2/52H05H1/24
CPCC08F2/52C09D4/00H05H1/24C08F220/1808C23C16/30C23C16/448C23C16/50H01J37/32449C23C14/54
Inventor 宗坚
Owner JIANGSU FAVORED NANOTECHNOLOGY CO LTD
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