Meter-scale grating diffraction wave-front splicing detection device and detection method
A grating diffraction and detection device technology, applied in the field of optical measurement, can solve the problems of inability to apply detection, cannot be used to detect meter-level grating diffraction wavefront, and there is no literature report on meter-level grating diffraction wavefront splicing detection device, etc., to achieve high Measuring the effects of repeatability, number reduction and measuring stitching time
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[0023] The present invention will be further described below with reference to the drawings and embodiments, but the protection scope of the present invention should not be limited by this.
[0024] See first figure 1 , figure 1 It is a schematic diagram of the structure of the meter-order grating diffraction wavefront splicing detection device of the present invention. It can be seen from the figure that the meter-order grating diffraction wavefront splicing detection device of the present invention includes a Fizeau-type interferometer 1 and a Fizeau-type interferometer standard mirror 2. It also includes an electronically controlled air-floating translation stage 3, a two-dimensional adjustment stage 5, a control system 6 and a computer 7. The two-dimensional adjustment stage 5 is fixed on the electronically controlled air-floating translation stage 3, so The output end of the control system 6 is connected to the control end of the electronically controlled air-floating transla...
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