Laser optical path system of a semiconductor pumped laser cleaning machine

Abstract

The invention discloses a laser path system of a semiconductor pumping laser cleaning machine and relates to the technical field of laser cleaning. Double pumping light sources are adopted for carrying out pumping motivation on laser crystals, after first harmonic waves are formed, ultraviolet laser beams are generated through intra-cavity second harmonic generation conversion and third harmonic generation conversion to be output, and the ultraviolet laser beams have the advantages of being high in electro-optical conversion efficiency, high in repetition frequency, small in pulse width, low in damage threshold and the like. The repetition frequency of a laser device with the laser path system can reach 20-100 KHz, and at the repetition frequency of 100 KHz, the average output power of 355nm lasers can reach 10 W; through an acousto-optical Q-regulated switch, the laser output pulse width can reach 40 ns, the beam quality factor M<2> is smaller than 1.2, and the laser remote divergence angle can be controlled at 1 mrad; the laser path system can be used for high-precision laser lossless cleaning, and is good in cleaning effect and suitable for large-area laser cleaning.

Description

technical field [0001] The invention relates to the technical field of laser cleaning, in particular to a laser optical path system of a semiconductor-pumped laser cleaning machine. Background technique [0002] At present, fiber lasers in the infrared band are generally used as cleaning light sources in the world, especially pulsed fiber lasers, which have been widely used because of their small size, stable products, and low power consumption. However, the fiber laser has problems such as the beam output through the fiber, the divergence angle is large, the beam quality is poor, and the beam is not suitable for frequency doubling. Even if the polarization state is changed through the crystal, the frequency doubling efficiency is less than 20%. At the same time, for the thickness Metal films below 0.5mm are not suitable for cleaning with fiber lasers. For example, the thickness of aluminum films in the lithium battery industry is 0.1mm, and the black pollutant is aluminum c...

AI Technical Summary

Problems solved by technology

However, the fiber laser has problems such as the beam output through the fiber, the divergence angle is large, the beam quality is poor, and the beam is not suitable for frequency doubling. Even if the polarization state is changed through the crystal, the frequency doubling efficiency is less than 20%. At the same time, for the thickness Metal films below 0.5mm are not suitable for cleaning with fiber lasers. For example, the thickness of aluminum films in the lithium battery industry is 0.1mm, and the black pollutant is aluminum cobaltate. Cleaning them with traditional fiber lasers will cause aluminum films deformation, even burning

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