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Vacuum evaporation coating device

A coating device and vacuum evaporation technology, which is applied in the field of vacuum evaporation coating devices, can solve the problems of poor process repeatability, not easy to obtain, and small adhesion, and achieve the effect of improving practicability

Inactive Publication Date: 2016-10-19
天津众伟科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention provides a vacuum evaporation coating device to solve the problems of low adhesion, difficulty in obtaining crystalline structure, and poor process repeatability in the above-mentioned background technology.

Method used

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  • Vacuum evaporation coating device
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Embodiment

[0022] This embodiment: as figure 1 As shown, a vacuum evaporation coating device includes a coating device 1, a vacuum device 2, and an evaporation device 3. The coating device 1 includes a substrate heater 4, a substrate 5, and a thin film 6. The vacuum device 2 includes a bell jar 7, Vacuum chamber 8, exhaust system 9, described evaporation device 3 comprises evaporation source 10 and film material 11, and described evaporation source 10 comprises film material container 12 and is arranged on the film material heater 13 in film material container 12, described The coating device 1 installed on the top of the vacuum device 2 is connected to the bottom end of the vacuum device 2 to install the evaporation device 3, and the vacuum chamber 8 installed in the bell jar 7 is provided with a substrate heater 4, a substrate 5, and a thin film successively from the top down. 6. A film material container 12 is set at the bottom, the substrate heater 4 is connected to the film 6 throug...

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Abstract

The invention belongs to the technical field of metal coating, and particularly relates to a vacuum evaporation coating device. The vacuum evaporation coating device comprises a coating device, a vacuum device and an evaporation device; the coating device comprises a substrate heater, a substrate and a film, the vacuum device comprises a bell jar, a vacuum cavity and an exhaust system, and the evaporation device comprises an evaporation source and a membrane material. The problems that adhesive force is small, a crystallization structure is difficult to obtain and process repeatability is poor are solved, and the vacuum evaporation coating device has the advantages that practicability of the device is improved, high-melting-point materials are evaporated, purity and quality of a film are improved, heat efficiency is high, heat conduction and heat radiation loss are small, and the device is suitable for the technical field of vacuum evaporation coating.

Description

technical field [0001] The invention belongs to the technical field of metal coating, and in particular relates to a vacuum evaporation coating device. Background technique [0002] A technique of producing thin-film materials by physical methods, in which atoms of the material are separated from the heating source in a vacuum chamber and hit the surface of the object to be plated. This technology was first used to produce optical lenses, such as nautical telescope lenses. Later extended to other functional films, disc aluminum plating, decorative coating and material surface modification, etc., such as imitation gold plating on the watch case, mechanical knife coating, changing the processing red hardness, the existing technology has low adhesion and is not easy to obtain crystal structure , The problem of poor process repeatability. Contents of the invention [0003] The present invention provides a vacuum evaporation coating device to solve the problems of low adhesio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30
CPCC23C14/30
Inventor 同建辉李卫东孙婧
Owner 天津众伟科技有限公司