Rod clamping mechanism of monocrystal silicon horizontal single-rod squarer

Abstract

The invention discloses a rod clamping mechanism of a monocrystal silicon horizontal single-rod squarer. The rod clamping mechanism comprises a head frame module and a tail frame module mounted on a base for respectively clamping two ends of a silicon rod; the head frame module includes a head frame and a head frame round steel module; the head frame round steel module includes a head frame chuck module, a head frame shaft module, a rotary driving mechanism for driving the head frame shaft module to rotate, and a head frame edge cover clamping module; the tail frame module includes a tail frame and a tail frame round steel module; the tail frame round steel module includes a frame chuck module, a tail frame shaft module and a tail frame edge cover clamping module; and space of rotating a cutting wire net of the squarer around the axis of the silicon rod is respectively formed between the chuck modules and the edge cover clamping modules. The rod clamping mechanism realizes horizontal clamping of monocrystal silicon rod, can rotate the silicon rod through respectively clamping a rod body and four edge covers and improving the structure of the rod clamping mechanism, and can realize automatic fall of the edge covers during rotating the silicon rod without damaging the surface quality of a square rod.

Description

technical field [0001] The invention relates to the technical field of crystal silicon cutting, in particular to a rod clamping mechanism applied to a single crystal silicon horizontal single rod opening machine. Background technique [0002] The method of making single crystal silicon is usually to make polycrystalline silicon or amorphous silicon first, and then use Czochralski method or suspension zone melting method to grow rod-shaped single crystal silicon from the melt. When the molten elemental silicon is solidified, the silicon atoms are arranged in the diamond lattice to form many crystal nuclei. If these crystal nuclei grow into grains with the same crystal plane orientation, these grains combine in parallel to crystallize into single crystal silicon. Monocrystalline silicon, also known as silicon single crystal, is the most basic material in electronic information materials and photovoltaic industries, and belongs to the category of semiconductor materials. Monoc...

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide a clamping mechanism of a monocrystalline silicon horizontal single-rod square cutting machine. Through the structure of one end fixed and one end clamped by the tailstock assembly and the headstock assembly, the horizontal loading of the monocrystalline silicon ingot is realized. Clamping solves the time-consuming and labor-intensive problem of viscose. At the same time, by clamping the rod body and the four parts of the side skin separately, the structure of the clamping rod mechanism is improved so that the silicon rod can be rotated, so that the side skin can be automatically dropped when rotating the silicon rod. drop without damaging the surface quality of the square bar

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