Clamping Mechanism of Monocrystalline Silicon Horizontal Single Rod Square Cutting Machine

Abstract

The invention discloses a single-crystal silicon horizontal single-rod squarer rod clamping mechanism, which comprises a head frame assembly and a tail frame assembly which are installed on a base and respectively clamp two ends of a silicon rod. The head frame assembly includes a head frame and a head frame The round steel assembly, the headstock round steel assembly includes the headstock chuck assembly, the headstock shaft assembly, the rotating drive mechanism that drives the headstock shaft assembly to rotate, the headstock clip edge assembly, and the tailstock assembly includes the tailstock and the tailstock round steel Assemblies, the tailstock round steel assembly includes the frame chuck assembly, the tailstock shaft assembly, and the tailstock clamping skin assembly. Between the clamping head assembly and the clamping skin assembly, there is a cutting wire mesh winding silicon for the square cutting machine. The space in which the rod axis rotates. This invention realizes the horizontal clamping of the single crystal silicon rod, and through the separate clamping of the rod body and the four parts of the skin, and the improvement of the structure of the clamping rod mechanism, the silicon rod can be rotated, and the edge can be realized when rotating the silicon rod. The skin will fall off automatically without damaging the surface quality of the square rod.

Description

technical field [0001] The invention relates to the technical field of crystal silicon cutting, in particular to a rod clamping mechanism applied to a single crystal silicon horizontal single rod opening machine. Background technique [0002] The method of making single crystal silicon is usually to make polycrystalline silicon or amorphous silicon first, and then use Czochralski method or suspension zone melting method to grow rod-shaped single crystal silicon from the melt. When the molten elemental silicon is solidified, the silicon atoms are arranged in the diamond lattice to form many crystal nuclei. If these crystal nuclei grow into grains with the same crystal plane orientation, these grains combine in parallel to crystallize into single crystal silicon. Monocrystalline silicon, also known as silicon single crystal, is the most basic material in electronic information materials and photovoltaic industries, and belongs to the category of semiconductor materials. Monoc...

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Problems solved by technology

[0004] The object of the present invention is to provide a clamping mechanism of a monocrystalline silicon horizontal single-rod square cutting machine. Through the structure of one end fixed and one end clamped by the tailstock assembly and the headstock assembly, the horizontal loading of the monocrystalline silicon ingot is realized. Clamping solves the time-consuming and labor-intensive problem of viscose. At the same time, by clamping the rod body and the four parts of the side skin separately, the structure of the clamping rod mechanism is improved so that the silicon rod can be rotated, so that the side skin can be automatically dropped when rotating the silicon rod. drop without damaging the surface quality of the square bar

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