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Method for preparing aluminum nitride ceramic substrate

A technology of aluminum nitride ceramics and substrates, which is applied in the preparation of aluminum nitride ceramics thick-sized substrates and the field of preparation of aluminum nitride ceramic substrates, which can solve the problems of uneven size shrinkage, uneven body, and low production efficiency. , to achieve the effect of automatic processing, high dimensional accuracy and high production efficiency

Active Publication Date: 2016-11-16
CHAOZHOU THREE CIRCLE GRP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Dry pressing has the following disadvantages: 1. Special molds need to be made; 2. Since the pressed green body is not uniform, it is easy to cause uneven size shrinkage after sintering, and the product often needs subsequent cutting processing. Too thick processing is difficult and costly. Higher; 3. Dry pressing often has defects such as pores, which affect product strength and thermal conductivity and other properties; 4. Uneven pressing at the same time can easily cause differences in the appearance of the sintered product and the performance of different parts; 5. Low production efficiency
[0003] Another method of preparing aluminum nitride thick substrates is to increase the thickness of the substrate by casting lamination. Common cast lamination has the following disadvantages: 1. Bubbles are easy to appear between the laminations due to the air not being exhausted; 2. The green sheet is in the Misalignment is prone to occur during the lamination process

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] An embodiment of the preparation method of the aluminum nitride ceramic substrate of the present invention, the preparation method of the aluminum nitride ceramic substrate described in this embodiment includes the following steps:

[0028] (1) Preparation of cast slurry: Add 970 parts of aluminum nitride powder, 30 parts of rare earth oxide, 150 parts of toluene and 120 parts of butanol into the ball mill tank, mix for 20 hours; then add 100 parts of polyvinyl alcohol The mixture of butyral, 150 parts of toluene, 120 parts of butanol and 40 parts of dibutyl phthalate is mixed and discharged after 16.5 hours to obtain casting slurry; wherein, the parts are parts by weight;

[0029] (2) Casting molding: the casting slurry prepared in step (1) enters the casting machine after vacuum degassing, and is cast into a casting green body with a thickness of 0.7mm;

[0030] (3) Stamping: stamping the cast green body into a monolithic green body with a length and width of 150mm; ...

Embodiment 2

[0038] An embodiment of the preparation method of the aluminum nitride ceramic substrate of the present invention, the preparation method of the aluminum nitride ceramic substrate described in this embodiment includes the following steps:

[0039] (1) Preparation of cast slurry: Add 970 parts of aluminum nitride powder, 50 parts of rare earth oxide, 180 parts of toluene and 100 parts of butanol into the ball mill tank, mix for 24 hours; then add 120 parts of polyvinyl alcohol A mixture of butyral, 160 parts of toluene, 100 parts of butanol and 50 parts of dibutyl phthalate is mixed and discharged after 18 hours to obtain a casting slurry; wherein, the parts are parts by weight;

[0040] (2) Casting molding: the casting slurry prepared in step (1) enters the casting machine after vacuum degassing, and is cast into a casting green body with a thickness of 0.8 mm;

[0041] (3) Stamping: stamping the cast green body into a monolithic green body with a length and width of 150 mm; ...

Embodiment 3

[0049] An embodiment of the preparation method of the aluminum nitride ceramic substrate of the present invention, the preparation method of the aluminum nitride ceramic substrate described in this embodiment includes the following steps:

[0050] (1) Preparation of casting slurry: 970 parts of aluminum nitride powder, 40 parts of rare earth oxide, 165 parts of toluene and 110 parts of butanol are added to the ball mill tank, and mixed for 22 hours; then add 110 parts of polyvinyl alcohol A mixture of butyral, 180 parts of toluene, 110 parts of butanol and 30 parts of dibutyl phthalate is discharged after continuing to mix for 15 hours to obtain a cast slurry; wherein the parts are parts by weight;

[0051] (2) Tape casting: the tape casting slurry prepared in step (1) enters the tape casting machine after vacuum degassing, and tape casts into a tape casting green body with a thickness of 0.75 mm;

[0052](3) Stamping: stamping the cast green body into a monolithic green body ...

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Abstract

The invention relates to a method for preparing an aluminum nitride ceramic substrate and belongs to the technical field of electronic ceramic preparation. The method comprises the steps of 1, preparing tape casting slurry; 2, tape casting, wherein the tape casting slurry prepared in step 1 is subjected to vacuum defoaming and then enters a tape casting machine so that a tape casting blank can be obtained through tape casting; 3, stamping, wherein the tape casting blank is stamped into uniwafer blanks; 4, solvent coating, wherein the front side and back side of each uniwafer blank are coated with an organic solvent; 5, laminating, wherein the uniwafer blanks coated with the organic solvent obtained in step 4 are stacked and then subjected to vacuum packaging; 6, isostatic pressing; 7, tape ranking; 8, sintering, wherein the aluminum nitride ceramic substrate is obtained through sintering. By coating the contact surfaces of the laminated blanks with the solvent, the prepared blanks are uniform, and the sintered product has high compactness (determined by the tape casting technology), uniform appearance and uniform performance.

Description

technical field [0001] The invention belongs to the technical field of electronic ceramic preparation, and in particular relates to a preparation method of an aluminum nitride ceramic substrate, in particular to a preparation method of an aluminum nitride ceramic thick-size substrate. Background technique [0002] At present, the preparation technology of aluminum nitride substrate mainly includes two forming processes: tape casting and dry pressing. Generally, thick substrates are prepared by dry pressing. Specifically, aluminum nitride powder is mixed with additives, then a binder is added, sprayed and granulated, the granulated powder is put into a dry pressing mold for pressing, and then sintered after debinding. Or after isostatic pressing and sintering, due to the uniformity of the pressed green body, the porcelain substrate often needs to be post-processed to meet the required size and accuracy requirements. Dry pressing has the following disadvantages: 1. Special mo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/581C04B35/622C04B35/632C04B35/634B28B3/00
CPCB28B3/00B28B3/003C04B35/581C04B35/622C04B35/632C04B35/6342C04B2235/3224C04B2235/60
Inventor 邱基华付君宇童文欣
Owner CHAOZHOU THREE CIRCLE GRP
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