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Acoustic surface wave sensor manufacturing method based on nano imprinting technology

A technology of nanoimprinting and surface acoustic wave, which is applied in the field of nanoimprinting, can solve the problems of narrow frequency response range, difficult to control precision consistency, high insertion loss, etc., and achieve low production cost, high practicability, improved consistency and The effect of quality factors

Inactive Publication Date: 2016-11-23
STATE GRID CORP OF CHINA +1
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Problems solved by technology

The interdigital transducer and the left and right reflective gratings are the core of the surface acoustic wave sensor, which directly affect the sensor quality factor (Q value). Inadequacies such as difficulty in controlling precision consistency

Method used

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  • Acoustic surface wave sensor manufacturing method based on nano imprinting technology
  • Acoustic surface wave sensor manufacturing method based on nano imprinting technology
  • Acoustic surface wave sensor manufacturing method based on nano imprinting technology

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Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0025] Nanoimprint technology is an emerging cross-technology combining nanomaterials and printing technology. Using the latest nano-functional sensing materials, through nano-printing methods, and using processes such as evaporation and spin-coating temperature treatment, it can be printed on substrates such as ceramics, plastics, and rubber. Printing electronic circuits and devices does not require complicated etching process, and has the characteristics of simple process and no pollution.

[0026] The technology was first proposed in 1995 by Stephen Chou, a Chinese professor at Princeton University in the United States. By placing the nanostructure template on the surface of the polymer film, under certain conditions s...

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Abstract

The invention discloses an acoustic surface wave sensor manufacturing method based on the nano imprinting technology. The method comprises steps that a primary imprinting template on which a distribution pattern of an interdigital transducer and reflecting gratings at left and right sides of the interdigital transducer are carved is generated; the primary imprinting template is utilized to carry out continuous printing on a substrate through a step-by-step repetition imprinting method, the substrate is made to become a secondary imprinting template having multiple patterns identical to the pattern on the primary imprinting template; and the secondary imprinting template is utilized to imprint an acoustic surface wave sensor. The method is advantaged in that generation of the interdigital transducer can be accurately controlled, quite high measurement precision and consistency can be realized, insertion loss of a high-frequency acoustic surface wave device can be reduced through reducing interdigital resistance of the interdigital transducer, a sensorquality factor Q value is stably improved, quite high practicality is realized, manufacturing cost of the interdigital transducer can be reduced, and no pollution is realized.

Description

technical field [0001] The invention relates to the technical field of nanoimprinting, in particular to a method for manufacturing a surface acoustic wave sensor based on a nanoimprinting process. Background technique [0002] A surface acoustic wave is a type of elastic wave that propagates along the surface of an object. Since the piezoelectric crystal itself is a transduction medium, there is coupling between electroacoustics, so an electroacoustic transducer can be fabricated on the surface of a piezoelectric crystal that propagates surface acoustic waves to convert electrical energy and acoustic energy, such as Figure 1A shown. When the transducer on the piezoelectric crystal substrate converts the input wireless signal into an acoustic signal through the inverse piezoelectric effect, it is reflected by the left and right periodic gratings to form resonance. The resonant frequency of the resonator is related to temperature, and its resonance The change of the frequenc...

Claims

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Application Information

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IPC IPC(8): G01K11/26G03F7/00
Inventor 周子冠欧清海刘柱甄岩李温静王云棣于华东张喆
Owner STATE GRID CORP OF CHINA
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