Pentaprism scanning detection method for aspheric reflector

Abstract

The present invention discloses a pentaprism scanning detection method for an aspheric reflector. The method comprises: 1) arranging a device required for detection; 2) performing scanning detection of a single bus; 3) performing scanning detection of the next bus of the rotation angle a of the aspheric reflector after the scanning of the single bus is completed; and 4) performing detection data processing and fitting. All the angle differences are transited to the slope values of the corresponding positions of the reflective surface of the aspheric reflector, the slope values are fitted with the Zernike gradient polynomial, and the low-order surface-shaped error parameters of the aspheric reflector are obtained. The high-precision low-order surface-shaped error parameters of the aspheric reflector can be obtained.

Description

Technical field [0001] The invention belongs to the technical field of optical system detection, and in particular relates to a pentaprism scanning detection method for aspheric mirror detection. Background technique [0002] The use of aspherical optical elements in the optical system can not only reduce the size and weight of the optical system, reduce the complexity of the system, but also correct aberrations and improve image quality, thereby greatly improving system performance. Therefore, aspheric optical components are the core components of military and civilian high-performance optical systems. They are used in aviation and aerospace remote sensing, astronomical observation, deep space exploration and photoelectric tracking instruments, lithography objective lenses, high-performance camera (camera) lenses and many other There are a wide range of applications in the field of optoelectronic instruments. [0003] However, with the continuous development of space optics techn...

AI Technical Summary

Problems solved by technology

However, for aspheric surfaces with large aperture and large offset, especially in the initial polishing stage, since the surface of the mirror does not reach a high reflectivity at this time, it cannot meet the detection requirements of CGH and other transmissive components, even if the reflectivity barely meets the detection requirements of CGH. , due to the low accuracy of the surface shape of the mirror at this stage, and the large deviation, the surface shape error in the local area has exceeded the resolution capability of the laser interferometer, resulting in the partial absence of interference fringes, and it is impossible to obtain a full-aperture surface shape information, such as figure 1 shown

At the same time, as the diameter of the mirror increases, the traditional three-coordinate measurement method can no longer meet the detection accuracy requirements of the polishing stage.

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