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Method for preparing high-purity hydrogen chloride

A technology of hydrogen chloride and high-purity hydrogen, applied in chlorine/hydrogen chloride, hydrogen chloride preparation, chlorine/hydrogen chloride purification and other directions, can solve the problems of affecting the effect of adsorption, easy to break, etc., and achieve the effect of good strength and not easy to break

Active Publication Date: 2017-01-04
ZHEJIANG BRITECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Molecular sieve adsorbents in the prior art are easily broken after long-term use, which affects the adsorption effect. It is necessary to find a new type of adsorbent with higher strength

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] (1) Preparation of efficient adsorbent:

[0023] Soak 100Kg of ultra-high cross-linked polystyrene adsorption resin, 1500Kg of electronic grade methanol, methanol content ≥ 99.99%, 1Kg of silver nitrate, 1Kg of cerium nitrate at 14°C for 20h, and then wash with electronic grade methanol until the water content is less than 0.01%. , and then separate the methanol by filtration, and then dry at 90°C until the methanol content is less than 0.001%, to obtain a high-efficiency adsorbent.

[0024] (2) Synthesis of hydrogen chloride:

[0025] High-purity hydrogen, H 2 ≥99.999% and high-purity chlorine, Cl≥99.99% respectively enter the synthesis furnace, the molar ratio of hydrogen to chlorine is 1.2:1, burn in the synthesis furnace at 1250°C to generate crude hydrogen chloride, which is cooled to 30°C through condensation.

[0026] (3) refined

[0027] Crude hydrogen chloride enters a 10 cubic meter adsorption tower equipped with 2000Kg of this high-efficiency adsorbent at ...

Embodiment 2

[0029] (1) Preparation of efficient adsorbent:

[0030] Soak 100Kg of ultra-high cross-linked polystyrene adsorption resin, 1000Kg of electronic grade methanol, methanol content ≥ 99.99%, 0.5Kg of silver nitrate, 0.5Kg of cerium nitrate at 10°C for 40h, and then use electronic grade methanol to wash until the water content is less than 0.01%, methanol is separated by filtration, and then dried at 80°C until the methanol content is less than 0.001%, to obtain a high-efficiency adsorbent.

[0031] (2) Synthesis of hydrogen chloride:

[0032] High-purity hydrogen, H 2 Content ≥ 99.999% and high-purity chlorine, Cl content ≥ 99.99% respectively enter the synthesis furnace, the molar ratio of hydrogen to chlorine is 1.2:1, burn in the synthesis furnace at 1250 ° C to generate crude hydrogen chloride, which is cooled to 20 ° C after condensation.

[0033] (3) refined

[0034] Crude hydrogen chloride enters a 5 cubic meter adsorption tower equipped with 1000Kg of this high-efficie...

Embodiment 3

[0036] (1) Preparation of efficient adsorbent:

[0037] Soak 100Kg of ultra-high cross-linked polystyrene adsorption resin, 1500Kg of electronic grade methanol, methanol content ≥ 99.99%, 2Kg of silver nitrate, 2Kg of cerium nitrate at 30°C for 10h, and then use electronic grade methanol to clean until the water content is less than 0.01% , and then separate methanol by filtration, and then dry at 100°C until the methanol content is less than 0.001%, to obtain a high-efficiency adsorbent.

[0038] (2) Synthesis of hydrogen chloride:

[0039] High-purity hydrogen, H 2 Content ≥ 99.999% and high-purity chlorine, Cl content ≥ 99.99% respectively enter the synthesis furnace, the molar ratio of hydrogen to chlorine is 1.3:1, and burn in the synthesis furnace at 1600 ° C to generate crude hydrogen chloride, which is cooled to 60 ° C after condensation.

[0040] (3) refined

[0041] Crude hydrogen chloride enters a 5 cubic meter adsorption tower equipped with 1000Kg of this high-e...

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PUM

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Abstract

The invention relates to a method for preparing high-purity hydrogen chloride. Firstly, an efficient adsorbent is prepared, electronic-grade hydrogen and electronic-grade chlorine enter a synthesis furnace to synthesize hydrogen chloride, the synthesized hydrogen chloride enters an adsorption tower containing the efficient adsorbent for refining and dechlorination, the adsorbed hydrogen chloride gas is cooled and liquefied, hydrogen and noncondensable gas are removed, and a high-purity hydrogen chloride product is obtained.

Description

technical field [0001] The invention relates to a method for purifying hydrogen chloride, in particular to a method for preparing high-purity hydrogen chloride. Background technique [0002] Electronic-grade products are mainly used in large-scale integrated circuits, liquid crystal screens, optoelectronic semiconductors, optical fibers, etc., solar polysilicon cells, solar thin-film cells, and other fields. At present, the microelectronics industry is developing rapidly in the direction of large size, high integration, high uniformity and high integrity. There are also new requirements for high-purity hydrogen chloride, which is widely used in vapor phase polishing of single crystal silicon and corrosion of epitaxial frame. More than 99.999% purity, also requires H 2 The lower the content of impurities such as O and metal ions, the better. High-purity hydrogen chloride gas is mainly used for high-temperature vapor phase etching of silicon and gallium arsenide before epita...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/01C01B7/07
CPCC01B7/012C01B7/0718
Inventor 陈刚周井森叶向荣张广第王宁李军钱红东张晓东陈立峰郑九丽
Owner ZHEJIANG BRITECH CO LTD
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