Preparation apparatus and method of lithium niobate crystal nano domain structure

A preparation device, a technology for lithium niobate, applied in the directions of crystal growth, nanotechnology, chemical instruments and methods, etc., can solve the problems of uneven sides of the microdomain structure, poor continuity, strong light scattering, etc., to promote development and application. , to achieve batch, easy to use effect

Active Publication Date: 2017-01-04
NANKAI UNIV
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AI Technical Summary

Problems solved by technology

The self-assembly technology based on pulsed light irradiation can realize micro-domain structures with a width of less than 100 nm, but the domain structure is in a disordered state, so high-quality micro-domain structures cannot be prepared
The micro-domain structure prepared by the back inversion technology is a quasi-regular array structure in the crystal Y direction, and the continuity is poor
Green light direct writing technology can be used to prepare high-quality micro-domain structures, but the structure is a surface domain with a depth of only tens of nanometers, which has no practical application
However, the periodic domain structure with a period of ~1 μm can be prepared by using multi-pulse polarization technology, but the sides of the micro-domain structure are not smooth, and the quality is poor, which is easy to cause strong light scattering.

Method used

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  • Preparation apparatus and method of lithium niobate crystal nano domain structure
  • Preparation apparatus and method of lithium niobate crystal nano domain structure
  • Preparation apparatus and method of lithium niobate crystal nano domain structure

Examples

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preparation example Construction

[0028] The preparation method of the lithium niobate crystal nano-domain structure provided by the present invention is mainly divided into three steps: first, constructing a domain wall structure in the lithium niobate crystal; second, heat-treating the sample; third, performing two steps on the sample secondary polarization. Specifically, the following steps are included:

[0029] Step (1): Polarized regions with opposite polarization directions are constructed in the lithium niobate crystal by using a polarization technique, thereby forming a domain wall structure in the lithium niobate crystal.

[0030] Step (2): placing the lithium niobate crystal in a high-temperature furnace for heat treatment.

[0031] Step (3): performing secondary polarization on the heat-treated lithium niobate crystal.

[0032] The above steps will be explained in detail below. Specifically include the following main steps:

[0033]Wherein, the lithium niobate crystal described in step (1) is a...

Embodiment 1

[0051] The lithium niobate crystal used in this embodiment is Z tangential doped magnesium 5mol% lithium niobate crystal with the same composition, the crystal diameter is 10 mm, and the thickness is 500 μm. The corresponding forward inversion voltage is 6.5kV / mm, and the back inversion voltage is 4.2kV / mm.

[0052] The specific implementation steps are:

[0053] (1) Construct a periodic poled structure in the sample by using a commonly used liquid electrode polarization device. The liquid electrode polarization device used in this example is as Figure 2a shown. First, the +Z surface of the crystal is plated with such Figure 2b For the photoresist pattern shown in the figure, the photoresist is made of polyimide with a thickness of 2 μm. in, Figure 2d The blank area in the middle is the electrode area, and the size of the electrode is 46 μm×5.4 μm. The distance between adjacent electrodes is 20 μm, and the long direction of the electrodes needs to be along the Y-axis ...

Embodiment 2

[0058] Different from Example 1, Example 2 will use the forward polarization technique to prepare the nano-domain structure.

[0059] The lithium niobate crystal used in this embodiment is Z tangential doped magnesium 5mol% lithium niobate crystal with the same composition, the crystal diameter is 10 mm, and the thickness is 500 μm. The corresponding forward inversion voltage is 6.5kV / mm, and the back inversion voltage is 4.2kV / mm.

[0060] The specific implementation steps are:

[0061] (1), with the step (1) in embodiment 1. First, the +Z surface of the crystal is plated with such Figure 2b For the photoresist pattern shown in the figure, the photoresist is made of polyimide with a thickness of 2 μm. in, Figure 2d The blank area in the middle is the electrode area, and the size of the electrode is 46 μm×5.4 μm. The distance between adjacent electrodes is 20 μm, and the long direction of the electrodes needs to be along the Y-axis direction of the crystal. Then, paste...

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Abstract

The invention provides a preparation apparatus and method of a lithium niobate crystal nano domain structure and is intended to solve the difficulty of the prior polarization technology in preparing a nano domain structure in lithium niobate crystal; the preparation apparatus and method are suitable for the preparation of nano domain structures in the field of ferroelectric crystal nano domain engineering, particularly for Z-tangential congruent lithium niobate crystal, magnesium-doped lithium niobate crystal and the like. The preparation method comprises the steps of first, constructing a domain wall structure in lithium niobate crystal; second, thermally treating a sample; third, secondarily polarizing the sample. By changing thermal treatment temperature and thermal treatment time, it is possible to prepare nano domain structures different in size; the size of the domain structures is generally of hundred nanometers level, and the depth thereof is of hundred micrometers level; by using the method, it is possible to prepare high-quality nano domain structures hundred micrometers in length; the method has the advantages that the method is simple to perform and is suitable for preparing nano domain structures in batch on a large scale.

Description

technical field [0001] The invention belongs to the technical field of micro-nano structure preparation, and relates to a preparation device and method of lithium niobate crystal nano-domain structure, which is suitable for the preparation of hundreds of nano-domain structures in the field of ferroelectric crystal nano-domain engineering, especially for Z-cut Lithium niobate crystals with the same composition, magnesium-doped lithium niobate crystals, etc. Background technique [0002] Lithium niobate crystals have excellent electro-optic, acousto-optic and nonlinear optical properties, and have important applications in the fields of optical parametric oscillators, electro-optic Bragg modulators, nonlinear echo gallery mode cavities, holographic storage, and frequency conversion. Called "optical silicon". The nonlinear effect of lithium niobate crystal is one of the widely used properties of lithium niobate crystal, but it is generally difficult to achieve phase matching c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B29/30C30B33/02C30B33/04B82Y40/00
CPCB82Y40/00C30B29/30C30B33/02C30B33/04
Inventor 张国权王晓杰薄方陈璟陈绍林孔勇发许京军
Owner NANKAI UNIV
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