ldmos device and its manufacturing method
A device manufacturing method, N-type technology, applied in the direction of semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problem that the P-type layer is difficult to meet at the same time, to achieve reduced impact ionization, low conduction resistance, and improved The effect of on-state breakdown voltage
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0062] Such as figure 1 As shown, the LDMOS device includes a P-type epitaxial layer 103, an N well 107, a P well 108, a first N-type drift region 104, a first P-type layer 105, a second N-type drift region 109, a second P-type layer 110, Gate oxide layer 111, gate polysilicon 112;
[0063] The P-well 108, the second N-type drift region 109, the first N-type drift region 104, and the N-well 107 are successively formed on the upper part of the P-type epitaxial layer 103 from left to right;
[0064] The gate oxide layer 111 is formed on the right part of the P well 108, the left part of the first N-type drift region 104 and above the second N-type drift region 109;
[0065] The gate polysilicon 112 is formed on the gate oxide layer 111;
[0066] The second N-type drift region 109 is shallower than the first N-type drift region 104;
[0067] The second P-type layer 110 and the first P-type layer 105 are formed in the P-type epitaxial layer 103;
[0068] The second P-type laye...
Embodiment 2
[0076] Based on the LDMOS device of the first embodiment, the N-type doping concentration of the first N-type drift region 104 and the second N-type drift region 109 is smaller than the N-type doping concentration of the N-well 107 .
[0077] Preferably, the N-type doping concentration of the first N-type drift region 104 and the second N-type drift region 109 is within 1e 16 / cm 3 to 5e 16 / cm 3 between.
[0078] In the LDMOS device of the second embodiment, the N-type drift region is lightly doped, which can increase the breakdown voltage of the PN junction between the N well 107 and the P well 108 .
Embodiment 3
[0080] Based on the LDMOS device of Embodiment 1, a field oxide 1062 in a field oxide region is formed above the first N-type drift region 104;
[0081] The gate oxide layer 111 is formed on the right part of the P well 108, the left part of the field oxide region 1062 and above the second N-type drift region 109;
[0082] There is a trench isolation region isolation oxide 1061 between the N-type heavily doped region 114 and the P-type heavily doped region 115 formed on the P well 108;
[0083] The trench isolation region isolation oxide 1061 is deeper than the field oxide region 1062 .
[0084] The LDMOS device of Embodiment 3 can be integrated in the BCD process, and the N-type drift region and the P-type layer are implanted on the bottom of the ultra-shallow trench in the field oxygen region using the mask plate etched by the ultra-shallow trench, and then the conventional isolation is formed. Trench, because the ultra-shallow trench isolation is carried out separately fro...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com