The invention discloses a method for improving
breakdown voltage of an N-groove laterally diffused
metal oxide semiconductor (
LDMOS). The method comprises the following steps of:1, manufacturing a deep N well (DNW), implanting
phosphorus into a P-type substrate (P SUB), and performing high-temperature drive-in and forming; 2, performing
thermal growth to form
field oxide, manufacturing a P well, and implanting
boron impurities once or for multiple times; 3, manufacturing a PTOP, implanting
boron impurities and forming after well implantation is finished and before
gate oxide is grown; 4, manufacturing a
polycrystalline silicon gate and a
polycrystalline silicon field plate; after
gate oxide is grown, depositing a layer of
polycrystalline silicon, and defining the positions of the polycrystalline
silicon gate and the field plate by
etching; and manufacturing a source and a drain, after the polycrystalline
silicon gate is formed, implanting
phosphorus or
arsenic into a device region once or for multiple times by using the polycrystalline
silicon gate and the
field oxide as hard masks, and implanting
boron once or for multiple times to form P+ which is required by the P well. The
impact ionization of the thinnest position of the device can be reduced, so that
voltage resistance of the device can be improved.