The invention discloses a
linear gradient doped GaAs planar
gunn diode which comprises a
semiconductor insulating substrate, a highly doped lower bottom surface N<+> layer, a
linear gradient doped N<-> type layer, a heavily doped upper surface N<+> layer, a table-
board structure, an upper
electrode and a lower
electrode, wherein the
semiconductor insulating substrate is used for supporting the whole GaAs planar
gunn diode; the highly doped lower bottom surface N<+> layer epitaxially grows on the
semiconductor insulating substrate; the
linear gradient doped N<-> type layer epitaxially grows on the lower bottom surface N<+> layer; the upper surface N<+> layer epitaxially grows on the linear gradient doped N<-> type layer; the table-
board structure is formed on the upper surface N<+> layer and the lower bottom surface N<+> layer through an island digging and insulating; the upper
electrode in an
ohmic contact is formed on the upper surface N<+> layer by
metal evaporation; and the lower electrode in an
ohmic contact is formed on the lower bottom surface N<+> layer by
metal evaporation. The invention also discloses a method for manufacturing the linear gradient doped GaAs planar
gunn diode. By utilizing the linear gradient doped GaAs planar gunn
diode, the working frequency of oscillating circuits within the ranges of
millimeter waves and submillimeter
waves is increased, and the conversion efficiency from
direct current to ratio frequency is enhanced.