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The preparation method of graphene film ball

A graphene film, silicon oxide microsphere technology, applied in instruments, measuring devices, mechanical devices, etc., can solve the problems of difficulty in maintaining electrical conductivity effectively for a long time, high production cost, short tip life, etc., and achieve high measurement accuracy and The effect of long service life, excellent wear resistance, good humidity resistance

Active Publication Date: 2019-04-05
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the conductive coating of conductive AFM probes is easy to wear during use, making it difficult to effectively maintain its conductivity for a long time. Therefore, relevant institutions in many countries are working on developing new probes with high resolution and longer service life.
At present, the new products of conductive AFM tips include carbon nanotube-based tips, diamond-coated tips and all-wire tips, etc. Although these new technologies overcome the shortcomings of short life and low resolution of ordinary conductive AFM tips to a certain extent , but its preparation process is very complicated and the production cost is high

Method used

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  • The preparation method of graphene film ball
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  • The preparation method of graphene film ball

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preparation example Construction

[0039] Please also refer to figure 1 , the first embodiment of the present invention provides a preparation method for preparing graphene membrane spheres by chemical vapor deposition, comprising the following steps:

[0040] Step S10, dispersing silicon oxide microspheres on the surface of a substrate;

[0041] Step S20, placing the substrate dispersed with silicon oxide microspheres into the reaction furnace;

[0042] Step S30, introducing a protective gas to exhaust the air in the reaction furnace;

[0043] Step S40, introducing reducing gas and heating the reaction furnace to the reaction temperature;

[0044] In step S50, under the protection of protective gas and reducing gas, a carbon source gas is introduced into the reaction furnace, and after a predetermined reaction time, graphene is directly grown on the surface of the silicon oxide microspheres to form a graphene layer.

[0045] In step S10, the particle size of the silicon oxide microspheres may be from 100 na...

Embodiment

[0075] Example: Disperse silicon oxide microspheres with an average particle size of 8 um on a quartz boat and place them into a quartz tube. Before heating, pass 1000 sccm of argon gas into the quartz tube to discharge the air in the quartz tube. The tube furnace was then heated to 1130° C., and 200 sccm of pure hydrogen gas was fed during the heating process. After heating to the target temperature, simultaneously adjust the flow of hydrogen and argon to 50 sccm. Finally, feed 6.3 sccm of methane gas to grow graphene. After two hours, the CVD tube furnace was turned on and allowed to rapidly cool down to room temperature within 30 minutes.

[0076] Please also refer to image 3 and Figure 4 The graphene layer 22 provided by the second embodiment of the present invention is continuously coated on the surface of the silicon oxide microspheres 21, and is in direct contact with the silicon oxide microspheres 21, so that the silicon oxide microspheres 21 are free of The gap...

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Abstract

The invention provides a preparation method of graphene membrane spheres. The preparation method includes the steps that silicon oxide microspheres are dispersed on the surface of a substrate, wherein the silicon oxide microspheres are distributed on the surface of the substrate in a single layer; the substrate with the silicon oxide microspheres dispersed is put into a reaction furnace; protective gas is introduced, and air in the reaction furnace is discharged; reducing gas is introduced, and the reaction furnace is heated to the reaction temperature; carbon source gas is introduced into the reaction furnace under protection of the protective gas and the reducing gas, graphene directly grows on the surfaces of the silicon oxide microspheres after preset reaction time, and a graphene layer is formed. The preparation method of the graphene membrane spheres is simple in process, and the prepared graphene membrane spheres have a longer service life.

Description

technical field [0001] The invention relates to a preparation method of a graphene membrane ball, in particular to a preparation method of a graphene membrane ball used for an atomic force microscope probe. Background technique [0002] Atomic force microscope (AFM) is an important instrument with atomic-level resolution for surface topography acquisition and electromagnetic performance analysis, and is an important characterization tool in the fields of surface science and nanotechnology. Among them, the AFM probe is an important part of the atomic force microscope, and it is a common consumable for this high-tech equipment. Its main manufacturers are distributed in Germany, Switzerland, the United States, Japan and other countries. Ordinary AFM probes are mainly prepared by processing silicon or silicon nitride using MEMS technology, while conductive AFM probes are coated with 10-50nm thick metal platinum (and other metals that improve the bonding force of the coating) on ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N19/02
CPCG01N19/02
Inventor 王华平刘淑娓马天宝于贵雒建斌
Owner TSINGHUA UNIV