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A kind of preparation method of sio2/tio2 anti-reflection film

An anti-reflection film and substrate technology, applied in the direction of instruments, coatings, optics, etc., can solve the problems of cumbersome implementation, changes in the microstructure of the film, difficult adjustment of the refractive index, etc., and achieve strong operability and continuously adjustable refractive index , fast response effect

Active Publication Date: 2019-01-25
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

Although this kind of film has good mechanical properties, the refractive index is not easy to control, the microstructure of the film changes, and the operation is extremely cumbersome.

Method used

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  • A kind of preparation method of sio2/tio2 anti-reflection film
  • A kind of preparation method of sio2/tio2 anti-reflection film
  • A kind of preparation method of sio2/tio2 anti-reflection film

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Embodiment Construction

[0024] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0025] SiO of the present invention 2 / TiO 2 The preparation method of the anti-reflection film, the specific operation steps are as follows:

[0026] Step 1, mix anhydrous ethanol, ammonia water, deionized water and ethyl orthosilicate with a molar ratio of 37.6:0.17:3.25:1, stir evenly and let stand in a stable environment for about 7 days to obtain alkali-catalyzed SiO 2 Sol; SiO 2 The mass percent concentration of sol is 3%, SiO 2 The effect of sol concentration on the obtained SiO 2 Thin films (about 100nm in thickness) will have an impact; in the above reaction system, ammonia water is the catalyst, tetraethyl orthosilicate is the silicon source, and absolute ethanol is the solvent;

[0027] Step 2, add a certain amount of butyl titanate into the mixture of absolute ethanol and toluene (the volume ratio of ...

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Abstract

The invention discloses a preparation method of a SiO2 / TiO2 antireflection film. The preparation method includes: using a sol-gel base catalysis method and a dip-coating method to prepare a low-refractive-index SiO2 antireflection film, immersing the antireflection film into a butyl titanate precursor solution, hydrolyzing in deionized water, and directly introducing a TiO2 nano material into the SiO2 antireflection film. The preparation method has the advantages that the method is simple in process, high in operability and fast in reaction, the TiO2 nano material is directly introduced into the SiO2 film structure of the antireflection film, the light transmittance of the antireflection film is high as compared with that of an existing SiO2 / TiO2 antireflection film, and the antireflection film is good in wear resistance and capable of achieving continuously-adjustable refractive index.

Description

technical field [0001] The present invention relates to a SiO 2 / TiO 2 The invention discloses a method for preparing an anti-reflection film, belonging to the technical field of optical thin films. Background technique [0002] At present, the preparation methods of anti-reflection film mainly include vacuum evaporation, magnetron sputtering, sol-gel method and chemical vapor deposition method. The sol-gel method has been used to prepare various thin films since the 1980s, and has also been widely used in the preparation of anti-reflection films. Its main advantages are: the raw material is a molecular-level material, with high purity, better control of composition, low reaction temperature, rheology, controllable porosity, and easy preparation of various shapes; the process is relatively simple and can be carried out simultaneously. Double-sided coating; lower cost for large area substrates. Therefore, in recent years, both at home and abroad have devoted themselves to...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C17/00G02B1/113
CPCC03C17/007C03C2217/212C03C2217/213G02B1/11
Inventor 张林陶朝友袁晓东倪卫严鸿维晏良宏
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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