High temperature synchronous compensation film strain gauge and its preparation method

Abstract

The invention provides a high temperature synchronous compensation film strain gauge and its preparation method. The strain gauge employs a high temperature alloy component as its substrate. And based on the substrate, the method is performed through the following steps: magnetically sputtering on the substrate a transitional alloy layer and oxidizing it at a high temperature for a thin oxidized aluminum film; sputtering the double ion beam to deposit an oxidized aluminum insulation film; radio frequency magnetically sputtering on the insulation film to deposit a suspension compensation layer column, a PdCr strain layer, and a suspension compensation PdCr strain layer; and sputtering Cr before high temperature oxidation to form a Cr2O3 protection layer. The invention is suitable for real time measurement in the working process of the component. Through the universal MEMS graphical technology, the sputtering PdCr as a strain layer and the preparation of a suspension PdCr strain layer to realize temperature compensation, the influence of temperature change on the strain measurement of the component can be compensated; therefore, the measurement efficiency of the strain gauge is increased, more particularly so at high temperatures. After the high temperature passivation of the magnetically sputtered Cr protection layer, the structure becomes more compact; better bonding effect can be achieved; and protection becomes available to the functional structure.

Description

technical field [0001] The invention relates to the technical field of thin-film sensor design and production, in particular to a high-temperature thin-film strain gauge prepared in situ on a high-temperature alloy component and having a temperature synchronous compensation function and a preparation method thereof. Background technique [0002] With the development of space technology and nuclear industry, a large number of components are required to work in high temperature environment. For components that operate at high temperatures for a long time, for example, in modern turbine aeroengine technology, turbine blades work in extreme environments of high temperature, high pressure, and high corrosion, and their load and creep are the main factors that cause failure. The strain detection of components puts forward very high requirements. In addition, the design and material selection of turbine blades has become a crucial link in the design and manufacture of engines. In...

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Problems solved by technology

[0007] When the resistance strain gauge works in an extreme high temperature environment such as an engine, a large resistance change will occur due to temperature changes, resulting in large deviations in measurement results

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