Inclined throwing optical fiber refractive index sensor and its preparation method

Abstract

The invention discloses an oblique projectile optical fiber refractive index sensor and a preparation method thereof. The sensor comprises single mode optical fiber, a V-shaped optical fiber groove and a colloidal crystal film, the end face of the single mode optical fiber is a 45-degree oblique plane, and the V-shaped optical fiber groove is located above the colloidal crystal film; the single mode optical fiber is located in the V-shaped optical fiber groove, and the 45-degree oblique plane faces upwards; the axis of the single mode optical fiber is parallel to the plane of the colloidal crystal film. The preparation method mainly comprises the steps that a V-shaped optical fiber groove array is made on a silicon wafer through a wet etching method, a colloidal crystal film array with certain thickness is made through a vertical deposition method, a colloidal crystal film base and V-shaped optical fiber groove are fixed through sticking, the single mode optical fiber is fixed subsequently and tightly pressed in the V-shaped optical fiber groove, and at last, scribing and packaging are conducted. The sensor is novel in structure, high in sensitivity, good in reliability, wide in linear measurement range, low in cost and capable of being produced in a batched mode and widely applied to refractive index detection in industry.

Description

technical field [0001] The present invention relates to a kind of oblique throwing optical fiber refractive index sensor device based on oblique throwing optical fiber and silicon wafer wet corrosion process, especially relates to optical fiber oblique throwing processing technology and photonic colloidal crystal coating silicon wafer end face process technology, which can control temperature Colloidal crystals are produced on the surface of the silicon wafer by the pressure-controlled vertical deposition process, and the silicon wafer is processed by the wet etching process, and the colloidal crystal film is formed by etching, and the other silicon wafer that is pasted and fixed is corre The end face is obliquely polished at 45 degrees and coated, and then bonded and packaged to form a refractive index sensor. Background technique [0002] The vast majority of photonic crystal fibers currently studied are based on drawing preforms with aligned structures, while microstructu...

AI Technical Summary

Problems solved by technology

On the one hand, it is difficult to prepare large-area, ordered and high-quality colloidal crystals; on the other hand, it is difficult to find matching connection methods and sensing circuits

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