A field emission cold cathode and its manufacturing method
A field emission cathode, manufacturing method technology, applied in cold cathode manufacturing, cold cathode, electron emission electrode/cathode, etc., can solve the requirements of high-performance device applications, low emission current and current density, poor emission stability, etc. problem, to achieve the effect of improving emission stability, reducing work function, and reducing turn-on electric field
Active Publication Date: 2019-05-07
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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[0004] The purpose of the present invention is to provide a method for manufacturing a field emission cathode to solve the problems of low emission current and current density, poor emission stability, etc. in the field emission cathode of nanomaterials in the prior art, which cannot meet the requirements of high-performance device applications.
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[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0029] The purpose of the embodiments of the present invention is to propose a new field emission cathode and its manufacturing method to solve the problems of low emission current and current density and poor emission stability in the field emission cathode of nanomaterials in the prior art, which cannot meet high requirements. performance device application requirements. Below in conjunction with accompanying drawing, the present invention will be further described.
[0030] figure 1 The implementation process of the manufacturing method of the field emission cathode provided by the first embod...
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Abstract
The invention provides a manufacturing method of a field emission cold cathode. The method comprises the following steps of providing a conductive substrate; coating the conductive substrate with graphene nanosheets; and depositing hexagonal boron nitride nanosheets on the surfaces of the graphene nanosheets. The graphene nanosheets coat the conductive substrates and the hexagonal boron nitride nanosheets are deposited on the surface of the graphene nanosheets, so that a stable composite nanostructure is formed between the hexagonal boron nitride nanosheets and the graphene nanosheets, the work function of graphene is reduced and the local electric field of the surface on the graphene is increased, thereby obviously reducing the turn-on field of a cathode and improving the emission current. Furthermore, the graphene is prevented from being bombarded by kations through the hexagonal boron nitride nanosheets and the emission stability of the cathode is improved.
Description
technical field [0001] The invention belongs to the field of vacuum electronic devices, in particular to a field emission cold cathode and a manufacturing method thereof. Background technique [0002] Vacuum electronic devices, such as microwave tubes, X-ray tubes, electronic propulsion and charge control devices, are key components in the fields of communication, space technology, safety detection, and medical imaging. The core component of vacuum electronic devices is the cathode, and metal hot cathodes are mainly used at present. However, metal hot cathodes have defects such as large volume, large heat radiation power consumption, long turn-on time, and material evaporation at high temperatures, which limit the development of vacuum electronic devices in the direction of miniaturization and integration. [0003] In recent years, field emission cold cathodes based on various one-dimensional / two-dimensional nanomaterials have received extensive attention and research by re...
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IPC IPC(8): H01J19/24H01J35/06H01J9/02
CPCH01J9/025H01J19/24H01J35/065
Inventor 洪序达梁栋石伟
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI