A kind of vacuum dedusting equipment for single crystal growth furnace

Abstract

The invention discloses a dust removal device for a single crystal growth furnace, which is installed between the vacuum pipe of the single crystal furnace and a vacuum pump, can effectively filter the volatile matter generated in the crystal pulling process, realize online dust removal, and reduce the consumption of vacuum oil Pollution greatly prolongs the continuous working time of the vacuum pump and thus prolongs the continuous running time of the single crystal furnace. The filtration efficiency of the dust removal equipment used in the single crystal growth furnace of the present invention is ≥99.99%. The anti-combustion cooler can perform primary filtration of the single crystal dust, and can filter the combustible dust to more than 95%. It is convenient for maintenance and inspection doors, and can save on-site maintenance cost; and can effectively remove impurities such as phosphorus, sulfur, carbon, and kun in the monocrystalline silicon gas, thereby improving the purity of monocrystalline silicon, reducing oil seal oil consumption, and making the vacuum system free from dust and solid particle pollution and damage.

Description

technical field [0001] The invention belongs to the technical field of environmental protection and dust removal, and in particular relates to a vacuum dust removal device for a single crystal growth furnace, which is suitable for dust removal of the single crystal furnace dust generated in the production process of the single crystal growth furnace. Background technique [0002] Today, with the rapid development of photovoltaic technology, solar cells produced by using silicon single crystals can directly convert solar energy into light energy, realizing the beginning of the green energy revolution. The single crystal growth furnace is a single crystal growth equipment. With the rapid development of photovoltaic technology, the industry has also developed rapidly. The single crystal growth requires vacuum and inert gas. The vacuum device should be able to ensure that the thermal vacuum degree in the furnace body is above 5×1024mm mercury column. If inert gas is used as the...

AI Technical Summary

Problems solved by technology

This leads to a decrease in production efficiency and an increase in maintenance costs

People want to use a single crystal furnace dust removal equipment, first of all there is SiO in the single crystal dust 2 、AL 2 o 3 , elemental P, MgO, Fe 2 o 3 Such as flammable dust, when the equipment is shut down for maintenance, it is easy to cause the dust to oxidize and burn rapidly when it encounters air. Secondly, the average particle size of single crystal dust is about 5 μm, and the dust particles are sticky and easy to stick to the bag. Therefore, it is difficult for ordinary bag dust removal equipment to Meet the dust removal requirements of single crystal growth furnace

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