Double-knot-film solar battery component and manufacturing method thereof
A technology of solar cells and manufacturing methods, which is applied to electrical components, circuits, photovoltaic power generation, etc., can solve the problems of inability to realize battery flexibility and large overall thickness of the battery, and achieve low cost, low manufacturing cost, and simple manufacturing process.
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[0047] In order to make the purpose, technical solution and advantages of the present invention clearer, the following will further describe in detail the embodiments of the present invention in conjunction with the accompanying drawings.
[0048] combine figure 1 , figure 2 and image 3 Shown, the present invention provides a kind of polycrystalline Ge (germanium) as bottom cell, GaAs (gallium arsenide) as the manufacturing method of the double-junction flexible thin-film battery of top cell, and concrete manufacturing method is as follows:
[0049] Step 1: Using epitaxial equipment such as MOCVD (Metal-organic Chemical Vapor Deposition) to sequentially grow an InGaAs graded buffer layer for adjusting lattice matching and a sacrificial layer for lattice matching with polycrystalline germanium on the GaAs substrate AlInAs; wherein, the maximum content of In is 1%. The epitaxy temperature is 630-670°C and the pressure is 50-100torr, preferably the epitaxy temperature is 650...
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