Tungsten rhenium thin-film temperature sensor cold-end compensating structure based on micro channel

Abstract

The invention discloses a tungsten rhenium thin-film temperature sensor cold-end compensating structure based on a micro channel. The structure comprises a thermocouple and a cold-end temperature compensation module. The thermocouple comprises a substrate provided with a thermocouple cold-end micro channel configured in probe-fin micro channel structure. The cold-end temperature compensation module includes a compensation wire, a first amplifier, a second amplifier, a cold-end temperature sensor, a microcontroller and a display module. The microcontroller comprehensively processes the voltage from the thermocouple and the voltage input by the cold-end temperature sensor, converts the voltage into a temperature signal, and displays the measured temperature in real time on the display module. The micro channel is applied to the cold-end position of the thermocouple substrate and is combined with the cold-end temperature compensation module so as to solve the high-temperature failure of the connection between the compensation wire and the tungsten rhenium thin-film thermocouple, to compensate the cold-end temperature of the thermocouple, to improve the accuracy and reliability of the measured temperature signal, and to achieve accurate and reliable high temperature measurement.

Description

technical field [0001] The invention belongs to the technical field of micro-temperature sensor chips, and in particular relates to a cold-end compensation structure of a tungsten-rhenium film temperature sensor. Background technique [0002] Thermocouple is the most commonly used temperature sensor in measurement technology, and its application has caused epoch-making changes in production technology and measurement science. Especially in the field of high temperature measurement, such as the measurement of the temperature before the turbine of the aeroengine and the temperature of the turbine blade, the thin film thermocouple shows excellent performance, with small heat capacity, rapid thermoelectric response, weak disturbance to the surrounding environment of the component, resistance to peeling and thermal shock, etc. advantage. The connection between the compensation wire of the thin-film thermocouple and the positive and negative electrodes of the thin-film thermocoup...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a micro-channel-based tungsten-rhenium film temperature sensor cold-end compensation structure, which combines the micro-channel with high-efficiency heat dissipation and the cold-end temperature compensation module to solve the problem of high temperature measurement in the prior art. The failure of the connection of the compensation wire of the thermocouple and the uncertainty of the temperature of the cold junction of the thermocouple bring errors to the measurement

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