Proton microscope, wavelength dispersive spectrometer, energy dispersive spectrometer and micro-nano processing platform

A technology of micro-nano processing and microscopy, applied in instruments, scientific instruments, material analysis using wave/particle radiation, etc., can solve the problems of low resolution and increased resolution of transmission electron microscopes, so as to reduce operating expenses and costs. , the effect of reducing the acceleration voltage

Active Publication Date: 2017-06-20
顾士平
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing optical microscope has a resolution of about 200nm; the scanning electron microscope with an accelerating voltage of 15KV has a resolution of 10nm; the transmission electron microscope with a spherical aberration correction of 300KV has a resolution of 0.074nm; Limited increase in resolution; actually lower due to other factors

Method used

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  • Proton microscope, wavelength dispersive spectrometer, energy dispersive spectrometer and micro-nano processing platform
  • Proton microscope, wavelength dispersive spectrometer, energy dispersive spectrometer and micro-nano processing platform
  • Proton microscope, wavelength dispersive spectrometer, energy dispersive spectrometer and micro-nano processing platform

Examples

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Effect test

example 1

[0091] Key words: proton transmission microscope function; proton scanning microscope function; proton energy spectrum analysis function; proton diffraction spectrum function; proton impact on the nucleus Mossbauer line and nuclear energy spectrum analysis function; The controllable combination of protons and sample molecules can add one or more hydrogen atoms to the sample molecule epitaxy or inside the molecule; the micro-nano processing function of the proton beam on the sample; the proton beam lithography function.

[0092] Proton transmission microscope function; proton scanning microscope function; proton energy spectrum analysis function; proton diffraction spectrum function; Molecular epitaxy or addition of one hydrogen atom or multiple hydrogen atoms inside the molecule; micro-nano processing of samples by proton beams; proton beam lithography.

[0093] Innovation:

[0094] 1) The platform uses proton beams to complete micro-nano processing; nanometer and sub-nanomet...

example 2

[0115] System composition: such as figure 1 As shown, the platform includes: a hydrogen storage tank or a hydrogen generator (101), a proton generator (102), a proton beam acceleration component (103), a proton screening component (115), a focusing scanning component (104), an aperture (105 ), secondary back-emission detector (106), sample rod (107), electromagnetic magnifying lens 1 (108), electromagnetic magnifying lens 2 (109), spherical aberration correction component (110), imaging plate or CCD or energy spectrum detection Device (111), proton recovery unit (112), image processing unit or computer (113), vacuum system (114);

[0116] This preferred example has only drawn electromagnetic magnifying lens 1 (108), electromagnetic magnifying lens 2 (109) two-stage lens; Enlarging proton can be to have only one-stage magnifying lens, promptly only has electromagnetic magnifying lens 1 (108); Also can have Two-level magnification, three-level magnification, four-level, five-le...

example 3

[0127] Such as figure 2 Shown is the principle block diagram of magnification and spherical aberration correction of the proton microscope; electromagnetic magnifying lens 1 (201), spherical aberration correction component 1 (202), electromagnetic magnification lens 2 (203), spherical aberration correction component 2 (204), electromagnetic magnification Lens n (205), spherical aberration correcting part n (206); electromagnetic magnifying lens 1 (201) is corrected by spherical aberration correcting part 1 (202), reduces the spherical aberration distortion formed by the magnifying system; electromagnetic magnifying lens 2 (203) is made of The spherical aberration correction component 2 (204) corrects to reduce the spherical aberration distortion formed by the magnification system; the electromagnetic magnifying lens n (205) is corrected by the spherical aberration correction component n (206) to reduce the spherical aberration distortion formed by the magnification system.

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Abstract

The invention discloses a proton microscope, a wavelength dispersive spectrometer, an energy dispersive spectrometer and a micro-nano processing platform. A proton transmission microscopy function, a proton scanning microscopy function, a proton energy spectrum analysis function, a proton diffraction spectrum function, and a proton-to-atomic nucleus impact energy spectrum analysis function are achieved; a sample atomic nucleus is bombarded by a proton beam to enable the atomic nucleus to generate a mossbauer spectral line; the wavelength of the mossbauer spectral line and energy of reflective and transmission protons are measured, and ingredients and contents of the atomic nucleus and ingredients and contents of an isotopic element are analyzed; the proton is combined with a sample molecule in a directional manner, and one or more hydrogen atoms can be added in the epitaxy or interior of the sample molecule; an electron is obtained by the proton and then is converted into the hydrogen atom, and one or more hydrogen atoms can be added in the epitaxy or interior of the sample molecule to generate a new material; the proton beam has a micro-nano processing function on the sample: the proton has high mass, and the sample is bombarded continuously by the proton beam under the control of a proton beam focusing system to perform micro-nano processing on the sample; and a proton beam photoetching function is performed.

Description

[0001] 1. Technical field [0002] The invention relates to a proton microscope, a spectrometer, an energy spectrometer, and a micro-nano processing platform, in particular to a proton microscope, a spectrometer, an energy spectrometer, and a micro-nano processing platform with plasma proton generation and electromagnetic screening. [0003] 2. Background technology [0004] The existing optical microscope has a resolution of about 200nm; the scanning electron microscope with an accelerating voltage of 15KV has a resolution of 10nm; the transmission electron microscope with a spherical aberration correction of 300KV has a resolution of 0.074nm; There is a limited increase in resolution; in practice the resolution is lower due to other factors. [0005] 3. Contents of the invention [0006] Problems to be solved: Use lower accelerating voltage and smaller volume to realize the function of proton transmission microscopy; the function of proton scanning microscope; the function o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/26H01J37/28H01J37/295G01N23/00
CPCG01N23/00H01J37/26H01J37/28H01J37/2955
Inventor 顾士平顾海涛
Owner 顾士平
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