Thin film inductor and power supply conversion circuit

Abstract

The embodiment of the invention provides a thin film inductor. The thin film inductor comprises a first thin film magnetic core and at least one second thin film magnetic core (230); at least one winding (220) is wound on the first thin film magnetic core (210) in the hard magnetization direction of the first thin film magnetic core (210); no winding is wound on the second thin film magnetic cores (230), each second thin film magnetic core (230) is not in the same plane with the first thin film magnetic core (210), the hard magnetization direction of each second thin film magnetic core (230) is same as that of the first thin film magnetic core (210), and projections, on a second plane, of the second thin film magnetic cores (230) and the first thin film magnetic core (210) are at least partially overlapped. The risk that magnetic flow is easily saturated in the easy magnetization direction can be reduced, and better inductance can be produced.

Description

technical field [0001] Embodiments of the present invention relate to the field of circuits, and more specifically, relate to a thin film inductor and a power conversion circuit. Background technique [0002] The power conversion system of the chip power supply is developing in the direction of miniaturization, and the main device in the power conversion system, the inductance, has a large volume and is difficult to integrate into the processor. At present, a high-frequency silicon-based copper-magnetic material-copper (CopperMagnetic Copper, CMC) thin film inductor is known. The thin film magnetic core in this thin film inductor is made of multi-layer magnetic thin films, and the shape can be closed. Or a rod-shaped open type. [0003] In the existing technology, such as figure 1 As shown, in order to obtain a larger inductance, a closed-shaped thin-film magnetic core structure is adopted, so that the magnetic flux generated by the winding is at figure 1 Continuous flow ...

AI Technical Summary

Problems solved by technology

However, since the magnetic thin film material has such figure 1 The direction in which it is difficult for magnetic flux to flow (referred to as the direction of hard magnetization for ease of understanding and description) and the direction of easy flow of magnetic flux (referred to as the direction of easy magnetization for ease of understanding and description), wherein, along the direction of easy magnetization, The large magnetic permeability makes the magnetic flux in the thin film magnetic core very easy to saturate in the direction of easy magnetization, which leads to the magnetic permeability close to zero, which makes the inductance drop sharply, the current in the circuit conversion circuit increases sharply, and even burns the device in serious cases

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