A flexible biological pH sensor based on nanowire texture and its preparation method
A pH sensor and nanowire technology, applied in the field of nanowire textured flexible biological pH sensor and its preparation, can solve the problems of inability to use for a long time, allergies, surface friction, etc., to eliminate allergic and uncomfortable reactions, and avoid direct contact , the effect of avoiding interference
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Embodiment 1
[0047] (1) Oxygen plasma treatment is performed on a flexible PI substrate with a thickness of 100μm. Specific parameters: vacuum degree 0.1Pa, working pressure 20Pa, working gas O 2 , Flow 20sccm, RF power 60w, room temperature treatment for 5min. Plasma treatment introduces hydrophilic groups on the surface and increases the adhesion of the surface, then cut into 1×1cm 2 Film.
[0048] (2) Design as figure 2 The photolithography template, the electrode template is prepared by ultraviolet exposure on the processed PI film, and Ti / Au electrodes with a thickness of 110nm with an interval of 3μm are deposited by electron beam evaporation. Ultraviolet exposure parameters: AZ5214 glue is baked 3min before 110℃, and exposed for 1s. Bake at 120℃ for 2min, expose for 20s, and develop for 1min. Electron beam evaporation parameters: vacuum degree 5×10 -6 mbar, Ti / Au thickness is 10 / 100nm respectively. The electrodes at both ends are led out by pressure welding. The microchannel electro...
Embodiment 2
[0053] (1) Treat a flexible PET substrate with a thickness of 100μm in oxygen plasma, with specific parameters: vacuum 0.1Pa, working pressure 20Pa, working gas O 2 , Flow 20sccm, RF power 60w, room temperature treatment for 5min. Plasma treatment introduces hydrophilic groups on the surface and increases the adhesion of the surface, then cut into 1×1cm 2 Sheets to make flexible substrates.
[0054] (2) The single-walled carbon nanotubes are processed to introduce carboxyl functional groups. The parameters are: take 15mg of single-walled carbon nanotubes and disperse them in 9mL of concentrated nitric acid (65% by mass) and 27mL of concentrated sulfuric acid (98% by mass), 110 Stir in an oil bath at ℃ for 45 minutes, wash the carbon nanotubes to neutrality, take 2mg of the dried carbon nanotubes and add them to a prepared 10ml solution of 1% sodium dodecylbenzene sulfonate (SDBS), and Disperse by ultrasonic at 300W for 60 minutes; add 300μL of the above solution to 40mL 1mol / L HC...
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