A device for generating glow discharge plasma

Abstract

The invention discloses a glow discharge plasma generation device, and the device comprises a grounding electrode, a blocking medium, a high-voltage electrode, a suspension electrode, and an air gap. The distance between the high-voltage electrode and the suspension electrode is less than 500 microns, and the high-voltage electrode and the suspension electrode are parallel to the blocking medium and the grounding electrode. After an electrode structure is connected electrically, the miniature gap between the high-voltage electrode and the suspension electrode performs discharging at first, and electrons generated by discharging are used for providing initial discharging electrons for the air gap, thereby enabling the air gap with certain electric field intensity to generate uniform glow discharge plasma under the action of the sufficient initial electrons. The device can generate uniform glow discharge plasma or plasma jet under the same technical conditions, reduces the production cost, simplifies the structure, and improves the production efficiency.

Description

technical field [0001] The invention belongs to the technical field of gas discharge plasma generation, and more specifically relates to a glow discharge plasma generation device. Background technique [0002] In recent years, the field of materials engineering and science has shown unprecedented prospects for development in industrial applications. As a new technology to improve the surface properties of materials, surface modification of materials plays an indispensable role in the development of materials science and science. The so-called surface modified technique is a type of heat treatment technology that uses chemical and physical methods to change the chemical composition or organizational structure of the material or workpiece surface to improve the performance of machine parts or materials. It includes chemical heat treatment (nitriding, carburizing, metallizing, etc.); surface coating (low-pressure plasma spraying, low-voltage arc spraying, laser remelting compo...

AI Technical Summary

Problems solved by technology

Among them, the Chinese patent application with the publication number CN1932132A and the name of the plasma surface treatment device for textiles and non-woven fabrics discloses a device for surface treatment of fiber fabrics using atmospheric pressure air plasma. The discharge form used in this patent is a general In the sense of dielectric barrier discharge, there is an air gap between the high-voltage electrode and the ground electrode, and does not contain any structure or method for providing initial electrons. The discharge voltage is relatively high, and the discharge becomes a filamentous streamer discharge. Therefore, in terms of treatment effect , because the discharge is an uneven streamer discharge, the treatment of the surface of the material is not uniform enough, and it is easy to cause the local temperature of the discharge to be too high, resulting in local burns or perforation of the processed material

[0006] Publication number CN203128919U, titled as the Chinese utility model patent of textile surface treatment machine, adopts a structure similar to the aforementioned invention patent application, and also uses the form of filamentary discharge to process the surface fabric. CN02151228.0 Chinese invention patent application also adopts a similar The electrodes are spaced apart and do not contain any structure or method for providing initial electrons. This kind of discharge is easily converted into a filamentary discharge, resulting in uneven treatment of the surface of the material, and it is easy to cause the temperature of the discharge to be locally too high, resulting in being processed Material localized burns or perforations

[0007] In addition, purely from the field of gas discharge, in the existing devices that use high-frequency power supply and dielectric barrier discharge to generate uniform air or glow discharge plasma at atmospheric pressure, the discharge gap generally does not exceed 3mm, such as Luo Haiyun of Tsinghua University, etc. In their paper "Luo H, Liu K, Ran J, et al. Study of DielectricBarrier Townsend Discharge in 3-mm Air Gap at Atmospheric Pressure[J]. PlasmaScience IEEE Transactions on, 2014, 42(5):1211-1215 "Using a special aluminum plate as a barrier medium to achieve a 3mm atmospheric pressure air uniform discharge, and claiming that there is no corresponding research on "Using a high frequency power supply to achieve an atmospheric pressure air diffuse dielectric barrier discharge with an air gap width exceeding 2mm" before them

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