Recombination method of oblique scan data in direct-write lithography machine
A technology of scanning data and lithography machine, applied in the field of reorganization, can solve problems such as increasing manufacturing cost and hardware complexity, reducing data processing speed, increasing equipment production capacity, etc., to improve exposure resolution and production capacity, and reduce hardware manufacturing costs. , the effect of increasing the speed
Active Publication Date: 2019-04-16
无锡影速半导体科技有限公司
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Problems solved by technology
[0004] Generally, the transformation and reorganization of data will be completed in the FPGA, and additional RAM is usually used to temporarily store the organized data in RAM and read it out when needed, but this will increase manufacturing costs and hardware complexity
Or use the logic resources inside the FPGA for data transformation and reorganization, which is generally non-real-time, which will seriously reduce the data processing speed, and thus cannot well achieve the purpose of increasing equipment production capacity by using inclined scanning
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[0028] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0029] In order to reduce hardware manufacturing costs and increase the speed of data transformation and reorganization, thereby effectively improving exposure resolution and production capacity, the present invention includes the following steps:
[0030] Step 1. For the digital micromirror chip DMD of 1920*1080P, according to the tilt factor K, the total amount of tilt data obtained is 2048*K, wherein the bit width of each tilt data is 256 bits, and each tilt data is divided into K group, each group of data is 256 / K bits, ; Select K RAMs for temporary storage of data in the FPGA;
[0031] Specifically, the number of tilt factors K is consistent with the number of mirror rows in the digital micromirror chip DMD, and for a certain digital micromirror chip DMD, the tilt factor K is determined accordingly. After the tilt factor K is determined, the total amoun...
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The invention relates to a recombination method, particularly relates to a recombination method for inclined scanning data in a write-through lithography machine and belongs to the technical field of inclined data processing of the write-through lithography machine. Inclined data are transformed and recombined according to an inclination factor, data storage is carried out by using an RAM in FGA, and writing and reading of required data are achieved, so that the hardware manufacturing cost can be reduced and the data transformation and recombination rate is improved, thereby effectively improving the exposure resolution ratio and the production capacity.
Description
technical field [0001] The invention relates to a recombination method, in particular to a method for recombining oblique scanning data in a direct-writing photolithography machine, and belongs to the technical field of oblique data processing in a direct-writing photolithography machine. Background technique [0002] Direct-write lithography equipment, also known as direct image transfer equipment, is a key equipment in the field of semiconductor and PCB production. Compared with the traditional semi-automatic exposure equipment, it uses a pattern generator to replace the mask plate of the traditional lithography machine, so that the graphic data of the computer can be directly exposed to the wafer or PCB board, saving the time of board making and the cost of making the mask plate. In order to further improve the exposure resolution and production capacity of the equipment, an oblique data processing method will be adopted for the data processing of the direct image transfe...
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IPC IPC(8): G03F7/20G06F3/06
CPCG03F7/2051G03F7/704G03F7/70508G06F12/10
Inventor 李显杰
Owner 无锡影速半导体科技有限公司