A Surface-Enhanced Raman Substrate Fabrication Method Based on Electron Dynamic Control

A technology of surface-enhanced Raman and electronic dynamic regulation, which is applied in the fields of nanotechnology, Raman scattering, and material excitation analysis for materials and surface science. It can solve the problems of easy oxidation by air, uneven size of silver nanoparticles, and limited Wide application and other issues to achieve the effect of improving the enhancement factor, regulating the electron density, and good chemical stability

CN107132210BActive Publication Date: 2019-09-17BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-09-17

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Abstract

The invention relates to an electronic dynamic regulation-based method for manufacturing a surface-enhanced raman substrate (SERS), and belongs to the technical field of raman spectrum molecular detection. The method comprises the following steps: (1) preparing a large-area consistent periodical wavy structure on a silicon substrate in the air by utilizing single pulse femtosecond laser; (2) performing secondary processing by utilizing 90-degree polarized dual-pulse femtosecond laser in an aqueous solution to prepare a nano-bar array structure; (3) plating a metal film having a nano-thickness on the nano-bar array substrate by utilizing an electron evaporating method; and (4) heating the metal film-plated nano-bar array substrate in a muffle furnace. A great number of uniform metal nano-particles cover the nano-bar array substrate after the heat treatment. Compared with the prior art, the method for manufacturing the SERS active substrate has the advantages of good sensitivity, good chemical stability, good space uniformity and relatively low manufacture cost.
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Description

technical field

[0001] The invention belongs to the technical field of Raman spectroscopic molecular detection, relates to a surface-enhanced Raman substrate manufacturing method, in particular to a surface-enhanced Raman (SERS) substrate manufacturing method based on electronic dynamic regulation. Background technique

[0002] In 1974, Fleischmann et al. found that when pyridine molecules are close to the rough electrode surface, the local electric field enhancement generated by the metal surface plasmon resonance can greatly enhance the electric field received by the molecule, thereby enhancing the Raman received by the far field. Signal, this is surface-enhanced Raman scattering (surface-enhanced Raman scattering, referred to as SERS). Because SERS technology can give information about the structure of substances at the molecular level, it has been widely used in the fields of biology, chemistry, environment, and material science. The explanations for the mechanism of SE...

Examples

Embodiment 1

[0034] A method for manufacturing a surface-enhanced Raman (SERS) substrate based on electronic dynamic regulation, the steps of which are as follows:

[0035] (1) build as figure 1 The femtosecond laser processing system shown;

[0036] (2) if figure 2 As shown in (a), in air, a single-pulse femtosecond laser was used to fabricate such as figure 2 (b) The large-area, consistent surface corrugation structure shown;

[0037] (3) if figure 2 As shown in (c), in an aqueous solution, a double-pulse femtosecond laser is used to fabricate a substrate with a corrugated surface such as figure 2 (d) The large-area, consistent nanorod array structure shown;

[0038] (4) if figure 2 As shown in (e), the nanorod array substrate prepared by the femtosecond laser is coated with a nanometer-thick metal film by using the electron beam evaporation coating method; in this embodiment, a gold film is coated, and the thickness of the gold film is 15nm. However, those skilled in the art...