A surface-enhanced fluorescence substrate of au-cu/ag-al nanometer multilayer film and its application
A nano-multilayer and enhanced fluorescence technology, applied in the field of spectroscopy, can solve the problems of inaccurate control of deposition rate and environmental pollution of thin films, and achieve the effects of low production cost, environmental friendliness and high efficiency
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[0024] A kind of Au-Cu / Ag-Al nano multi-layer film surface enhanced fluorescent substrate, the preparation method comprises the following steps:
[0025] 1) Wash and dry the glass slides for later use.
[0026] 2) Install the Au-Cu and Ag-Al composite targets on the DC cathode respectively, load the cleaned glass slide into the sample stage, and adjust the distance between the target and the substrate to be 50mm. Au / Cu mass ratio = 1 / 4, Ag / Al mass ratio = 2 / 3 in Au-Cu and Ag-Al composite targets.
[0027] 3) Turn on the machine and pump the vacuum to 1x10 -3 pa, then pass in argon gas, adjust the Ar flow rate to 30sccm, and adjust the working pressure to 1.5Pa.
[0028] 4) Turn on the sputtering power supply, and alternately sputter Au-Cu and Ag-Al, wherein the sputtering power is 40W and 60W respectively, and the single sputtering time is controlled to be 1min, and the total sputtering time is 6min.
[0029] 5) After the sputtering is completed, turn off the sputtering pow...
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