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Diamond-like film

A technology of diamond film and diamond layer, which is applied in the direction of metal material coating process, superposition layer plating, vacuum evaporation plating, etc., can solve the problems of low friction coefficient, poor bonding force between DLC film layers, and unsightly appearance. Achieve low friction coefficient and ensure high hardness

Active Publication Date: 2019-11-12
VITALNK IND SHENZHEN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] As mentioned above, DLC film is an amorphous carbon film with high hardness and low friction coefficient, so its film structure, thermal expansion coefficient, etc. are relatively different from those of conventional metal substrates and transition layers such as metal nitrides and carbides. large difference, resulting in poor interlayer bonding of conventional DLC films
[0005] In addition, the color of the DLC film prepared by the conventional method is not deep enough, the L value is generally between 48 and 55, the color is gray, and it is not beautiful enough, which limits its application in the field of decorative plating that requires very strict color appearance.
For the process of preparing high-quality hydrogen-containing DLC ​​films by magnetron sputtering, it is actually difficult to change its color by doping other elements, because the target is easily poisoned in the presence of a large amount of carbon source gas
Although different colors can be obtained by depositing conventional PVD films on the surface of the DLC layer using techniques such as reactive magnetron sputtering, there is also the problem that the bonding force between the PVD film and the DLC layer is not good, and the surface layer film also loses the uniqueness of the DLC film. Excellent wear resistance, scratch resistance, corrosion resistance and chemical stability

Method used

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Embodiment 1

[0029] The present embodiment is a kind of diamond-like carbon (DLC) thin film, and its structure is as follows figure 1 shown, including:

[0030] Substrate 1;

[0031] The metal primer layer 2 deposited on the substrate has a thickness of 0.4 μm;

[0032] The metal carbide transition layer 3 deposited on the metal primer layer 2, the C content in the metal carbide transition layer 3 is gradually increased from 2% to 50%, and gradually changes from the metal primer layer 2 to the first DLC layer 4. Incremental; the total thickness of the metal carbide transition layer 3 is 1 μm; during the preparation of the metal carbide transition layer 3, C 2 h 2 、CH 4 The carbon source gas is supplied in a gradually increasing manner; specifically, the metal carbide transition layer 3 can be formed by one unit transition layer or by more than two stacked unit transition layers;

[0033] The first DLC layer 4 deposited on the metal carbide transition layer 3, the first DLC layer 4 is ...

Embodiment 2

[0045] A kind of diamond-like carbon (DLC) thin film of the present embodiment comprises:

[0046] Substrate;

[0047] The metal primer layer deposited on the substrate is deposited by magnetron sputtering with a Ti target, and a bias voltage of -50 to -200V is applied to the substrate during the deposition process, with a thickness of 0.3μm;

[0048] The metal carbide transition layer deposited on the metal primer layer, the C content in the metal carbide transition layer gradually increases from 2% to 50%, and gradually increases from the metal primer layer to the first DLC layer; its use Cr target + W target for reactive magnetron sputtering deposition, C 2 h 2 、CH 4 The carbon source gas is supplied in a gradually increasing manner, and a bias voltage of -50 to -400V is applied to the substrate, and the thickness of the metal carbide transition layer is 1.2 μm;

[0049] a first DLC layer deposited on the metal carbide transition layer, having a refractive index of 2.3 ...

Embodiment 3

[0053] A kind of diamond-like carbon (DLC) thin film of the present embodiment comprises:

[0054] Substrate;

[0055] The metal primer layer deposited on the substrate is deposited by magnetron sputtering with a Ti target, and a bias voltage of -50 to -200V is applied to the substrate during the deposition process, with a thickness of 2 μm;

[0056] The metal carbide transition layer deposited on the metal primer layer, the C content in the metal carbide transition layer is 2% to 50% and gradually increases, and gradually increases from the metal primer layer to the first DLC layer; its Reactive magnetron sputtering deposition with Cr target + W target, C 2 h 2 、CH 4 The carbon source gas is supplied in a gradually increasing manner, and a bias voltage of -50 to -400V is applied to the substrate, and the thickness of the metal carbide transition layer is 0.1 μm;

[0057] a first DLC layer deposited on the metal carbide transition layer, having a refractive index of 1.9 an...

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Abstract

The invention relates to a diamond-like film. The diamond-like film comprises a metal bottoming layer deposited on a base material, a metal carbide transition layer deposited on the metal bottoming layer, a first diamond-like layer deposited on the metal carbide transition layer and a second diamond-like layer deposited on the first diamond-like layer. The first diamond-like layer is a functional diamond-like layer. The second diamond-like layer is a color control diamond-like layer. The diamond-like film is high in interlayer bonding force, has the beneficial effects of high hardness, high smoothness, the low friction coefficient, corrosion resistance and the like, has the appearance of the dark color system and is quite suitable for the decoration coating field with quite strict requirements for color appearances and reliability performance.

Description

technical field [0001] The invention relates to the technical field of thin film materials, in particular to a diamond-like carbon thin film. Background technique [0002] With the continuous development of various technologies and the complexity of use conditions and places, the current market has higher and higher requirements for decorative films used in 3C electronic products such as clocks, mobile phones, and other high-end decorative plating fields. In addition to color, appearance In addition to the strict requirements, there are also strict requirements on the wear resistance, scratch resistance, corrosion resistance and chemical stability of the film. [0003] Diamond-like carbon film (DIAMOND-LIKE-CARBON, hereinafter referred to as DLC) is an amorphous film composed of C elements, similar in nature to diamond, and has a graphite atomic structure. DLC film has the advantages of high hardness and elastic modulus, low friction coefficient, wear resistance, corrosion ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/06C23C16/26C23C28/04
CPCC23C14/0036C23C14/0057C23C14/025C23C14/0635C23C14/35C23C16/26C23C28/046
Inventor 田梦军
Owner VITALNK IND SHENZHEN