Method for in-situ growing graphene sensor substrate on hard alloy
A cemented carbide, in-situ growth technology, applied in the field of materials, can solve problems such as poor bonding force, reduced mechanical and electrical properties of graphene substrates, and graphene shedding, and achieve the effect of overcoming low sensitivity
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[0029] In this example, the amorphous SiC film is deposited by magnetron sputtering on the surface of the Co-containing hard alloy, and the graphene sensor substrate required for space drilling is grown in situ on the surface of the hard alloy by vacuum annealing, and the Co-catalyzed SiC film is used to form a graphene matrix. Effect of medium annealing temperature and mechanism of action of Si atoms. Include the following steps:
[0030] 1. Sample preparation
[0031] 1) Select the substrate: the substrate is two kinds of sheets, the single crystal silicon wafer Si is used for the structural reference of the SiC film, and the cemented carbide YG8 (WC-Co 8%) is used for the structural analysis of the graphene substrate;
[0032] 2) Substrate pretreatment: The substrate was ultrasonically cleaned in acetone and absolute ethanol solutions for 10 minutes, dried with nitrogen and placed in a vacuum chamber to be deposited;
[0033] 3) Deposition of SiC: The SiC thin film was de...
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