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Superconducting nanowire single photon detector

A single-photon detector and superconducting nanowire technology, applied in the field of light detection, can solve the problems of increasing dynamic inductance and decreasing device count rate, and achieve the effects of increasing current, reducing total inductance, and improving signal-to-noise ratio.

Active Publication Date: 2017-12-22
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a superconducting nanowire single photon detector, which is used to solve the problem of the superconducting nanowire single photon detector in the prior art due to the single nano meander wire structure. , the total length of nanowires increases with the square of the area, resulting in a rapid increase in dynamic inductance and a sharp drop in the count rate of the device

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Embodiment 1

[0071] see Figure 1 to Figure 3 , the present embodiment provides a superconducting nanowire single photon detector, the superconducting nanowire single photon detector includes a layer of superconducting nanowire structure 1, and the superconducting nanowire structure 1 includes several parallel spaced rows The linear portion 11 of the cloth and the first connecting portion 12 connecting the linear portion 11 end to end in sequence; wherein, the linear portion 11 includes at least two superconducting nanowires 111 arranged in parallel at intervals, each of the linear portions 11 The superconducting nanowires 111 inside are connected via the first connecting portion 12 . In the present invention, the straight line portion 11 of the superconducting nanowire structure 1 is set as at least two superconducting nanowires 111 arranged in parallel at intervals, and the superconducting nanowires 111 in each straight line portion 11 pass through the When one of the superconducting na...

Embodiment 2

[0085] see Figure 4 to Figure 6 , this embodiment also provides a superconducting nanowire single photon detector, the specific structure of the superconducting nanowire single photon detector described in this embodiment is the same as that of the superconducting nanowire single photon detector described in Embodiment 1 The specific structures are roughly the same, and the difference between the two is that: compared with the superconducting nanowire structure 1 in the first embodiment, the superconducting nanowire structure 1 in this embodiment has a second connection part 13 added, and the The second connecting portion 13 is located in the straight line portion 11, and between the superconducting nanowires 111 arranged in parallel in the straight line portion 11, and connects the adjacent superconducting nanowires 111 in the straight line portion 11. The conductive nanowires 111 are connected. By adding the second connection part 13 in the superconducting nanowire structu...

Embodiment 3

[0090] Please combine Figure 1 to Figure 3 refer to Figure 7 to Figure 9 , the present embodiment also provides a superconducting nanowire single photon detector, the superconducting nanowire single photon detector described in the present embodiment comprises: a substrate 2; an N-layer dielectric layer 4, the N-layer dielectric layer 4 are sequentially stacked on the upper surface of the substrate 2, wherein N is an integer ≥ 1; an N-layer superconducting nanowire structure 1, the superconducting nanowire structure 1 is located on the corresponding side of the dielectric layer 4 On the upper surface, and when N≥2, the superconducting nanowire structure 1 in the first N-1 layers is completely covered by the dielectric layer 4 on the upper layer.

[0091] As an example, the specific structure of the superconducting nanowire structure 1 is completely the same as that of the superconducting nanowire structure 1 described in the first embodiment, please refer to the first embod...

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Abstract

The invention provides a superconducting nanowire single photon detector which comprises at least one superconducting nanowire structure. The superconducting nanowire structure comprises a number of straight line parts which are arranged in parallel and with spacing, and first connection part which connect the straight line parts in order from end to end. Each straight line part comprises at least two superconducting nanowires which are arranged in parallel and with spacing. The superconducting nanowires in all straight line parts are connected through the first connection parts. At least two superconducting nanowires which are arranged in parallel and with spacing are arranged in each straight line part of the superconducting nanowire structure, which reduces the total inductance of the device, and improves the response speed of the device. The current in the device is improved. The signal to noise ratio of the device can be improved.

Description

technical field [0001] The invention belongs to the technical field of light detection, and relates to a superconducting nanowire single-photon detector, in particular to a superconducting nanowire single-photon detector. Background technique [0002] Superconducting Nanowire Single Photon Detector (SNSPD) is a new type of single photon detector developed in recent years, which can realize high-efficiency single photon detection in the visible to near-infrared band. Due to its advantages such as high quantum efficiency, low dark count, high detection rate, and low time jitter, SNSPD has been rapidly applied in applications such as quantum information technology, laser communication, satellite-to-earth ranging, bioluminescent detection, and depth imaging. [0003] SNSPD mainly uses low-temperature superconducting ultra-thin film materials, such as NbN, Nb, NbTiN, WSi, etc. The typical thickness is about 5-10nm, and the device usually adopts a meandering nanowire structure wi...

Claims

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Application Information

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IPC IPC(8): H01L39/02
CPCH10N60/80
Inventor 李浩尤立星王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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