Wafer production technology

A production process, wafer technology, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of welding stress of wafer chip inclusion impurities, copper ions cannot be cleaned thoroughly, and affect chip corrosion rate, etc., to achieve environmental benefits The effect of protection, guaranteed performance, and avoiding electrical degradation

Inactive Publication Date: 2018-01-09
RUGAO XIAYUAN SCI & TECH ESTABLISH A BUSINESS SERVICES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, chips are soldered with chips, solder and leads at high temperature, and then the chip surface is acid-treated. However, during the pickling process, the metal impurities in the solder and leads will react with the acid and affect the corrosion rate of the chips. At the same time, The metal ions generated by the reaction of these metals with the acid will adhere to the surface of the chip, and a large amount of water and chemical reagents are required to clean in the subsequent process; this kind of cleaning not only consumes a lot of resources, but also the copper ions attached to the surface of the chip cannot be thoroughly cleaned, and will It will cause the electrical degradation of the product and thermal breakdown and other failures at high temperatures; in addition, it will also cause high metal content in the discharged cleaning solution, which will cause serious pollution to the soil after discharge; during welding, it will also cause inclusions in the chip Impurities and welding stress

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] The production process of the wafer in this embodiment includes six processes of pickling, electroplating, welding, alkali cleaning, insulation protection and post-treatment. The specific steps are as follows:

[0018] (1) Pickling: Place the wafer chip in a mixed solution of nitric acid and sulfuric acid with a volume ratio of 10:5 for acid etching. The etching time is 8 minutes, and the acid temperature is controlled between 5°C;

[0019] (2) Electroplating: After pickling, the wafer chip is electroplated to form a metal protective layer on the surface of the wafer chip, and the thickness of the coating layer is 5 µm;

[0020] (3) Welding: Put the two metal lead electrodes, the solder piece and the plated chip into the fixture, send it to the welding furnace for heating, the temperature is controlled at 300°C, and the welding time is 15 minutes, so that the chip is connected to the metal lead ;

[0021] (4) Alkali cleaning: Place the soldered wafer chip and metal lea...

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PUM

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Abstract

The invention relates to a wafer production process, which includes six processes of pickling, electroplating, welding, alkali cleaning, insulation protection and post-treatment. The advantages of the present invention are: the production process of the wafer of the present invention, first pickling, then soldering, then alkali cleaning, and finally insulation protection, the chip is acid-etched before soldering, avoiding the metal in the solder and lead wires during the pickling process. Impurities will react with acid and affect the corrosion rate of the chip; avoid the metal ions generated by the reaction of metal and acid from attaching to the surface of the chip, saving a lot of cleaning process and saving resources; avoid the electrical degradation of the product and thermal shock at high temperature Wear and other faults, improve the electrical yield of the product; at the same time, it also reduces the metal content in the discharged cleaning solution, reduces the pollution to the soil, and thus is conducive to environmental protection.

Description

technical field [0001] The invention relates to the technical field of wafer production, in particular to a wafer production process. Background technique [0002] As chips are widely used in the market, their demand is getting higher and higher. At present, chips are soldered with chips, solder and leads at high temperature, and then the chip surface is acid-treated. However, during the pickling process, the metal impurities in the solder and leads will react with the acid and affect the corrosion rate of the chips. At the same time, The metal ions generated by the reaction of these metals with the acid will adhere to the surface of the chip, and a large amount of water and chemical reagents are required to clean in the subsequent process; this kind of cleaning not only consumes a lot of resources, but also the copper ions attached to the surface of the chip cannot be thoroughly cleaned, and will It will cause the electrical degradation of the product and thermal breakdown...

Claims

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Application Information

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IPC IPC(8): H01L21/02
Inventor 曹建民
Owner RUGAO XIAYUAN SCI & TECH ESTABLISH A BUSINESS SERVICES CO LTD
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