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A method for regeneration of inner wall board of dry engraving machine

A technology of inner wall board and dry engraving machine, which is applied in metal material coating process, coating, fusion spraying, etc., can solve the problems of unsatisfactory anodizing effect, uneven film thickness, unsatisfactory performance of aluminum oxide film, etc. Achieve the effects of safe and environmentally friendly manufacturing process, excellent film performance, and improved service life

Active Publication Date: 2020-01-17
芜湖通潮精密机械股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the anodic oxidation effect of Al is not ideal, and a porous aluminum oxide film with uneven film thickness is produced. The performance of the aluminum oxide film cannot meet the harsh environmental requirements of the current production of liquid crystal panels and semiconductor products.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] First, simply clean the inner wall parts of the dry engraving machine, using a mixed acid solution (HNO 3 12% for HF, 7% for HF) for a short time (about 10s) to remove surface dirt, wash with pure water for a second time, and dry the cleaned workpiece with an air gun. Then, wrap the non-spraying surface of the inner wall plate workpiece with a special tape for spraying, and then use artificial corundum to sandblast the inner wall plate. It is 1 meter, spray it once first, and the roughness is greater than 3.0um. After sandblasting, clean the inner wall panel workpiece with pure water, and then dry it with an air gun. Then use the anodic oxidation process to coat the coating surface of the inner wall plate with 41 μm thick Al 2 o 3 film. Finally, wrap it with a special tape for spraying, so that all the surfaces that do not need to be sprayed are covered with tape. Paste the film to fix the inner wall panel workpiece in the spray booth, use Y 2 o 3 The powder is s...

Embodiment 2

[0020] First, simply clean the inner wall parts of the dry engraving machine, using a mixed acid solution (HNO 3 12% for HF, 7% for HF) for a short time (about 10s) to remove surface dirt, wash with pure water for a second time, and dry the cleaned workpiece with an air gun. Then, wrap the non-spraying surface of the inner wall plate workpiece with special tape for spraying, and then use artificial corundum to sandblast the inner wall plate. It is 1 meter, spray it once first, and the roughness is greater than 3.0um. After sandblasting, clean the inner wall panel workpiece with pure water, and then dry it with an air gun. Then use the anodic oxidation process to coat the coating surface of the inner wall plate with 45 μm thick Al 2 o 3 film. Finally, wrap it with a special tape for spraying, so that all the surfaces that do not need to be sprayed are covered with tape. Paste the film to fix the inner wall panel workpiece in the spray booth, use Y 2 o 3 The powder is spr...

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Abstract

The invention discloses a dry etching machine table inner wallboard regeneration method. The regeneration method includes the steps that an inner wallboard is sequentially subject to sand blasting, anodizing film coating and plasma spraying yttrium oxide film coating; and then ultrasonic cleaning and drying are carried out to obtain a film coating and regeneration inner wallboard. According to thedry etching machine table inner wallboard regeneration method, through cooperative matching in all regeneration steps, the service life of the dry etching technology ceramic wallboard is obviously prolonged, the working performance of the dry etching technology ceramic wallboard is obviously improved, the hardness is higher, and wear resistance, heat resistance, corrosion resistance and insulating property are more excellent.

Description

technical field [0001] The invention belongs to the technical field of coating regeneration, and in particular relates to a regeneration method for an inner wall plate of a dry engraving machine. Background technique [0002] At present, the domestic flat panel display industry and the semiconductor industry are booming, but there are very few companies that provide matching core electronic components for the flat panel display industry and the semiconductor industry, especially the domestic domestic industry. The industry has been facing competition from foreign manufacturers, especially price competition, so manufacturers urgently need to find suppliers with strong service capabilities and competitive prices. At present, the few suppliers are all Japanese-funded, Korean-funded, and Taiwan-funded enterprises, but there are no localized Chinese-funded companies. The cleaning and regeneration of parts in the LCD panel industry is mainly done abroad. There is only one domesti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C4/134C23C4/11
Inventor 王慧赵浩黄艳芳
Owner 芜湖通潮精密机械股份有限公司
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