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EFPI fiber pressure sensor and manufacturing method thereof

A pressure sensor and pressure technology, applied in EFPI optical fiber pressure sensor and its production, silicon glass-based EFPI optical fiber pressure sensor and its production field, can solve the problem of increasing the difficulty and complexity of the manufacturing process, unable to guarantee the parallelism of the reflecting surface, affecting the transmission. Photosensitive signal quality and other issues, to reduce the complexity of the MEMS process, improve the signal quality, and achieve the effect of good parallelism

Inactive Publication Date: 2018-02-06
BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Two double-sided polished single-crystal silicon wafers and a glass wafer with through holes are bonded twice to form a Faper microcavity structure. The two reflective surfaces of the microcavity structure are polished single crystals. Although the parallelism and roughness of the two reflective surfaces are guaranteed on the surface of the silicon wafer, the difficulty and complexity of the manufacturing process are increased by the double bonding; the single crystal silicon wafer and the glass wafer with a blind hole formed by corrosion A method of bonding to form a Fapo microcavity structure. The two reflective surfaces of the microcavity structure are the surface of a polished single crystal silicon wafer and the bottom surface of a blind hole. Although the one-time bonding process is simple, the formation of corrosion on the glass wafer The bottom of the blind hole is bowl-shaped, and the parallelism with another reflective surface cannot be guaranteed. At the same time, the surface roughness formed by corrosion is poor, which affects the quality of the sensing light signal.

Method used

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  • EFPI fiber pressure sensor and manufacturing method thereof
  • EFPI fiber pressure sensor and manufacturing method thereof
  • EFPI fiber pressure sensor and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] An EFPI fiber optic pressure sensor, such as figure 1 , figure 2 As shown, a single-mode silica fiber is selected as the transmission fiber, a quartz hollow tube with an outer diameter of 2 mm and an inner diameter of 130 μm is used as a cylindrical hollow tube, and a double-polished single crystal silicon wafer with a thickness of 200 μm and a diameter of 4 inches is selected. BF33 glass sheet with a thickness of 500 μm and a diameter of 4 inches. Such as image 3 , Figure 4 , Figure 5 As shown, the pressure sensitive structure is composed of two layers, the upper unit 2 of the pressure sensitive structure and the lower unit 3 of the pressure sensitive structure.

[0036] A method for manufacturing an EFPI optical fiber pressure sensor: perform standard cleaning on a single crystal silicon wafer 12 and a glass wafer 15; process a blind hole array on the lower surface 13 of the single crystal silicon wafer, and form the blind hole bottom surface 11 with the The ...

Embodiment 2

[0040] In the manufacturing process of the pressure sensitive structure in Example 1, the anodic bonding process in a vacuum environment is changed to the anodic bonding in a local atmospheric pressure environment, so as to realize the manufacturing of the sensitive structure of the gauge pressure sensor.

Embodiment 3

[0042] Such as Figure 7 As shown, in the process of making the pressure-sensitive structure in Example 1, the bottom surface 11 of the blind hole on the single crystal silicon wafer 12 is plated with a glass reflective film 17 with a reflectivity of 4%, and anodic bonding is carried out in a vacuum environment Completed the making of the Fapo microcavity 1: the upper surface 14 of the glass wafer is the first reflection surface of the Fapo microcavity 1, the glass reflective film 17 is the second reflection surface of the Fapo microcavity 1, and the depth of the blind hole is is the cavity length of Fapp microcavity 1. In this way, the contrast ratio of the interference signal returned by the sensor is improved, and the demodulation of the instrument signal is facilitated.

[0043] Embodiment 3 Sensor and the uncoated sensor spectral test contrast such as Figure 8 shown. The sensor spectrum of embodiment 3 is improved in contrast.

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Abstract

The invention relates to an EFPI fiber pressure sensor and a manufacturing method thereof, in particular to a silicon glass-based EFPI fiber pressure sensor made by use of the MEMS technique, and a manufacturing method thereof, and belongs to the technical field of fiber pressure sensors. A pressure sensing structure is of a two-layered structure and comprises a pressure sensing structure upper layer unit and a pressure sensing structure lower layer unit. The pressure sensing structure upper layer unit is made of monocrystalline silicon wafer sheet materials. The pressure sensing structure lower layer unit is made of glass wafer sheet materials. According to the invention, when the MEMS technique complexity is reduce, it can be ensured that the parallelism of two reflection faces forming aFabry-Perot micro-cavity is good and the roughness grade is high; the quality of interference light spectrums is improved; and reliability of the fiber pressure sensor based on the MEMS technique andthe measurement precision of the whole pressure sensing system are improved.

Description

technical field [0001] The invention relates to an EFPI optical fiber pressure sensor and a manufacturing method thereof, in particular to a silicon glass-based EFPI optical fiber pressure sensor manufactured by MEMS technology and a manufacturing method thereof, belonging to the technical field of optical fiber pressure sensors. technical background [0002] The extrinsic Fabry-Perot interferometer (EFPI) fiber optic sensor has been developed into various sensors to suit different application fields because of its high sensitivity, small size, simple structure and flexible design. A typical EFPI sensor structure consists of a cavity, that is, an incident fiber and an exit fiber. Of course, the two reflective surfaces forming the F-P cavity can be the surface of any optical element. Therefore, in order to meet the pressure measurement requirements, based on thin film The structure of the EFPI fiber optic pressure sensor is more suitable. There are many types of EFPI fiber o...

Claims

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Application Information

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IPC IPC(8): G01L1/24
CPCG01L1/246
Inventor 隋广慧江琴陈爽张慧君张欣颍
Owner BEIJING CHANGCHENG INST OF METROLOGY & MEASUREMENT AVIATION IND CORP OF CHINA