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An SOI micro-ring photonic biosensor preparing method based on one-dimensional photonic crystals

A dimensional photonic crystal and biosensor technology, applied in the field of optical biochemical sensing, can solve the problem of low etching rate and achieve the effect of simple equipment requirements, high sensitivity and easy process

Active Publication Date: 2018-02-16
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Compared with wet etching, this method has a lower etching rate, but it can achieve good control over the etching process

Method used

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  • An SOI micro-ring photonic biosensor preparing method based on one-dimensional photonic crystals
  • An SOI micro-ring photonic biosensor preparing method based on one-dimensional photonic crystals
  • An SOI micro-ring photonic biosensor preparing method based on one-dimensional photonic crystals

Examples

Experimental program
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Effect test

Embodiment 1

[0046] A method for preparing a SOI microring photonic biosensor based on a one-dimensional photonic crystal, comprising the following steps:

[0047] S1, pretreatment, cleaning the SOI sample; specifically includes the following sub-steps:

[0048] S11. Put the SOI sample blown with nitrogen into an acetone solution, clean it with ultrasonic waves for 5 minutes, and then dry it with nitrogen;

[0049] S12. Put the SOI sample treated in step S11 into Piranha solution for cleaning for 10 minutes, rinse with DI water, and then dry with nitrogen;

[0050] S13. Put the SOI sample treated in step S12 into HF solution for cleaning for 15 s, rinse with DI water, and then dry with nitrogen gas;

[0051] S2, pre-baking, pre-baking the pre-treated SOI sample in a thermostat at 180°C for 2 minutes, and then cooling to room temperature;

[0052] S3, glue coating, apply photoresist on the pre-baked SOI sample by spin coating; the specific operation method is: first spin coating at a spee...

Embodiment 2

[0059] A method for preparing a SOI microring photonic biosensor based on a one-dimensional photonic crystal, comprising the following steps:

[0060] S1, pretreatment, cleaning the SOI sample; specifically includes the following sub-steps:

[0061] S11. Put the SOI sample blown with nitrogen into an acetone solution, clean it with ultrasonic waves for 8 minutes, and then dry it with nitrogen;

[0062] S12, putting the SOI sample treated in step S11 into Piranha solution for cleaning for 12 minutes, rinsing with DI water, and then drying with nitrogen;

[0063] S13. Put the SOI sample treated in step S12 into HF solution for cleaning for 18 seconds, rinse with DI water, and then dry with nitrogen gas;

[0064] S2, pre-baking, pre-baking the pre-treated SOI sample in a thermostat at 180°C for 3 minutes, and then cooling to room temperature;

[0065] S3, glue coating, apply photoresist on the pre-baked SOI sample by spin coating; the specific operation method is: first spin co...

Embodiment 3

[0072] A method for preparing a SOI microring photonic biosensor based on a one-dimensional photonic crystal, comprising the following steps:

[0073] S1, pretreatment, cleaning the SOI sample; specifically includes the following sub-steps:

[0074] S11. Put the SOI sample blown by nitrogen into an acetone solution, clean it with ultrasonic waves for 10 minutes, and then dry it with nitrogen;

[0075] S12. Put the SOI sample treated in step S11 into Piranha solution for cleaning for 15 minutes, rinse with DI water, and then dry with nitrogen;

[0076] S13, putting the SOI sample treated in step S12 into the HF solution for cleaning for 20 seconds, rinsing with DI water, and then drying with nitrogen;

[0077] S2, pre-baking, pre-baking the pre-treated SOI sample in a thermostat at 180°C for 5 minutes, and then cooling to room temperature;

[0078] S3, glue coating, apply photoresist on the pre-baked SOI sample by spin coating; the specific operation method is: first spin coa...

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Abstract

An SOI micro-ring photonic biosensor preparing method based on one-dimensional photonic crystals is disclosed. The method includes S1) cleaning an SOI sample; S2) pre-baking the pretreated SOI samplein a constant-temperature oven having a temperature of 170-200 DEG C for 2-5 min; S3) coating photoresist through a spin coating manner; S4) baking the sample in the constant-temperature oven having atemperature of 170-200 DEG C for 10-15 min; S5) subjecting the sample to electron beam lithography, with a shape of electron beam lithography being an SOI micro-ring resonant cavity based on one-dimensional photonic crystals; S6) subjecting the sample to developing and fixing in order; S7) etching the sample by adopting ICP; and S8) cleaning the etched sample. An SOI micro-ring photonic biosensorprepared by the method has characteristics of high sensitivity, a low detection limit, easy integration, and the like, and the method facilitates sensing property improvement of optical biosensors. The method has simple requirements on equipment and can be easily implemented technically.

Description

technical field [0001] The invention belongs to the technical field of optical biochemical sensing, and in particular relates to a method for preparing a SOI microring photon biosensor based on a one-dimensional photonic crystal. Background technique [0002] The currently applied biochemical sensors include heat, quantity, electricity, and light in terms of their detection mechanisms. Among them, the optical biochemical sensors with light as the detection mechanism, because compared with other types of biochemical sensors, optical biochemical sensors have non-destructive properties. With many advantages such as high sensitivity, high sensitivity, and fast response, optical biochemical sensors have been widely used and become an important part of today's optical sensor devices, and are widely used in civilian and military fields. [0003] At present, SOI optical biochemical sensors are research hotspots in this field, and the optical waveguide structures of SOI optical bioch...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/00
CPCG01N21/00
Inventor 王卓然袁国慧管磊彭芳草彭真明
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA