Gas sensing and UV light detection integrated system
A technology of gas sensing and integrated systems, applied in the field of integrated detection, to reduce costs, save costs and improve performance
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Embodiment 1
[0081] An integrated system of gas sensing and UV light detection, mainly including the following modules: vacuum chamber 1, temperature measurement and control system 2, electrode test system 3, gas control system 4, UV light control system 5, humidity control system 6 and semiconductor gas sensor7.
[0082] Preferably, the gas sensing and UV light detection integrated system mainly uses wide bandgap materials. The wide band gap material mainly includes BN, GaN and ZnO.
[0083] Wide bandgap material is a new type of material, which has the characteristics of large bandgap width, high electron drift saturation velocity, small dielectric constant, and good electrical conductivity. Utilizing the unique bandgap width of wide bandgap materials, blue light, green light, ultraviolet light devices and photodetection devices can be fabricated. Wide bandgap materials can adapt to harsh living and working environments.
[0084] The vacuum chamber 1 mainly includes a chamber body 101...
Embodiment 2
[0131] An experiment using the system described in any one of claims 1 to 11 to detect UV light and gas sensing characteristics, mainly comprising the following steps:
[0132] 1) Assemble and debug the integrated system of gas sensing and UV light detection.
[0133] Further, the debugging of the integrated system of gas sensing and UV light detection mainly includes: detecting whether the long-wave ultraviolet tube 501, the medium-wave ultraviolet tube 502, and the short-wave ultraviolet tube 503 can emit light normally; Whether the gas function is normal, whether the airway 402 is unblocked, etc.
[0134] 2) Turn on the switch I, turn off the switch II and the switch III, so that the inside of the cavity 101 is filled with UV light in the 315-390nm band.
[0135] 3) Fill the gas in the gas bottle 406 into the cavity 101 .
[0136] Further, the gas in the gas bottle 406 can be CH 4 or H 2 . During the experiment, a plurality of gas bottles 406 were prepared, and the gas...
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