OLED evaporation device

Abstract

The invention relates to an OLED evaporation device. The OLED evaporation device comprises an evaporation working device and an OLED substrate feeding device which are arranged in the horizontal direction in a front-back mode, wherein the OLED substrate feeding device is provided with a hollow motor outer seat fixedly connected with a separation ring, a hollow rotary cup is arranged at the centerof the hollow motor outer seat, the front end of the hollow rotary cup is in rotary connection with an inner ring of the separation ring, a rotary end cap is arranged at the center of the hollow rotary cup, and an OLED substrate fixing device is arranged at the front end of the rotary end cap. The OLED evaporation device utilizes the advantages of a centrifugal principle and a hollow shaft motor structure, and the original design of basic flat-laying arrangement is changed and is changed into an annular cylindrical arrangement, so that a single vacuum chamber can contain more OLED substrates.In addition, the effect similar to centrifugation is produced through rotation of OLED substrates, so that the substrate impacting strength of evaporation material molecules in the vacuum chamber is remarkably improved, the uniformity of coating film can be also improved while the production efficiency is improved, the leakproofness of the whole structure is good, and pollution caused by leakage is reduced.

Description

technical field [0001] The invention relates to the technical field of OLED manufacturing, in particular to OLED evaporation equipment. Background technique [0002] In the known technical field, the front plate process is the most important link in the entire OLED process. The specific process is: after cleaning and drying the TFT substrate in different ways, it is sent to a nitrogen environment for cooling, and the substrate is reversed. Make the membrane face down. The processed substrate is sent into a vacuum chamber for evaporation of various functional layers and luminescent layers. After evaporation, AMOLED is tested for functionality and appearance, and polarizers are attached, and finally enters the module segment process. [0003] In the evaporation process of OLED, special evaporation equipment is needed. The so-called evaporation refers to heating methods such as current heating in vacuum, electron beam bombardment heating or laser heating, so that the evaporat...

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Problems solved by technology

[0004] 1. The replacement of the evaporation source: After the evaporation material is exhausted, it needs to be removed from the vacuum chamber for addition or replacement. How to reduce the frequency of replacement and effectively ensure the air pressure treatment of the vacuum chamber before and after the replacement, It is extremely critical to improve production efficiency and reduce downtime and maintenance rates. At the same time, it is also prone to pollution problems. The existing equipment generally designs the vacuum chamber to be directly opened and closed. The replacement of the evaporation source is more frequent, and the vacuum The vacuuming process of the chamber takes a long time, and it is difficult to accurately quantify the control of the temperature process, which requires continuous intermittent repeated debugging in production

[0005] 2. The number of OLED panels processed at a time in the vacuum chamber: the general idea of ​​the existing evaporation equipment is to arrange the substrates horizontally, so the evaporation source generally needs to be placed above the substrate. Although the layout method is relatively mature, this method needs to consider the stability of process parameter control. It is impossible to place a large number of substrates in the same vacuum chamber in a large area, so the number of single processing is small, and it takes up a lot of space. The requirements are high, and with the increase in the size of the processed substrate, the structural arrangement of the evaporation heating device is more complicated, and the stability of the process parameters is more difficult to control

[0006] 3. Stability of evaporation process parameters: Traditional evaporation equipment generally adsorbs the substrate through the free movement of evaporation material molecules, and the parameters that can be controlled in the evaporation process are basically only the temperature and the arrangement of the heating source, so The process stability has not been high, which leads to the problem of poor yield rate. The solution for actual mass production can only be to continuously adjust the best parameters to improve the uniformity of the coating

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