Sensor with contact-pressing and ultrasonic functions
What is Al technical title?
Al technical title is built by PatSnap Al team. It summarizes the technical point description of the patent document.
A sensor and touch pressure technology, applied in the field of sensors, can solve problems such as poor sensitivity, achieve good practicability, improve sensitivity, and increase complexity and difficulty.
Pending Publication Date: 2018-04-24
BEIJING SINO CANBRIDGE MED TECH CO LTD
View PDF10 Cites 4 Cited by
Summary
Abstract
Description
Claims
Application Information
AI Technical Summary
This helps you quickly interpret patents by identifying the three key elements:
Problems solved by technology
Method used
Benefits of technology
Problems solved by technology
Using ultrasound to detect palpable tissue lesions, especially solid tumors, will cause poor sensitivity and local ultrasound heat generation.
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more
Image
Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
Click on the blue label to locate the original text in one second.
Reading with bidirectional positioning of images and text.
Smart Image
Examples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0061] refer to figure 1, the present invention relates to a sensor 100 with touch pressure and ultrasonic functions, the sensor 100 includes a substrate 110 and an ultrasonic detection unit 120 and a touch pressure detection unit 130 formed on the substrate 110 .
[0062] The ultrasonic detection unit 120 includes a first ultrasonic detection electrode layer 121 formed on the lower surface of the substrate 110 and a first elastic film 122 and a second ultrasonic detection electrode layer 123 sequentially formed on the upper surface of the substrate 110 .
[0063] The touch detection unit 130 includes a first touch detection electrode layer 131 formed on the lower surface of the substrate 110, a second elastic film 132 and a second touch detection electrode layer sequentially formed on the upper surface of the substrate 110. electrode layer 133 .
[0064] Wherein, the above-mentioned sensor 100 further includes a contact layer 140, the contact layer 140 corresponds to the to...
Embodiment 2
[0104] see Figure 6 , the present invention also discloses the preparation method of the sensor described in Example 1, specifically, including the following steps:
[0105] The first step is to prepare the upper plate.
[0106] For the upper plate, for example, a 4-inch SOI double-sided polished first silicon wafer 123 with a thickness of 300 μm is selected to make the upper plate part.
[0107] Through reverse coating, photolithography, and development of graphics, through the deep silicon etching process, etching penetrates the entire first silicon wafer to form alignment marks for bonding the upper plate during the bonding process.
[0108] The second step is to prepare the lower plate.
[0109] The lower plate is prepared, and the lower plate is, for example, a 4-inch second silicon wafer 110 with a thickness of 300 μm and polished on both sides. The lower plate is formed by the following steps:
[0110] Form an oxide layer of about 0.8 μm by thermal oxygen on both s...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
PUM
Login to view more
Abstract
The invention discloses a sensor with contact-pressing and ultrasonic functions. The sensor comprises a substrate as well as an ultrasonic detection unit and a contact-pressing detection unit which are formed on the substrate; the ultrasonic detection unit comprises a first ultrasonic detection electrode layer formed on the lower surface of the substrate as well as a first elastic film and a second ultrasonic detection electrode layer which are formed on the upper surface of the substrate sequentially; the contact-pressing detection unit comprises a first contact-pressing detection electrode layer formed on the lower surface of the substrate as well as a second elastic film and a second contact-pressing detection electrode layer which are formed on the upper surface of the substrate sequentially; the sensor further comprises a contact layer; the contact layer corresponds to the contact-pressing detection unit and is formed on one side, far away from the substrate, of the second contact-pressing detection electrode layer; the contact layer comprises a contact bulge; the contact bulge faces to the second contact-pressing detection electrode layer. When an external force acts on the sensor, the contact bulge can transmit the external force to the second elastic film well, so that the second elastic film generate greater deformation and the sensitivity of the sensor is improved.
Description
technical field [0001] The invention relates to the technical field of sensors, in particular to a sensor with touch pressure and ultrasonic functions. Background technique [0002] The most common method of human examination of the body surface and palpable tissues is palpation. Using the pressure sensor array to simulate the tactile corpuscles arranged in the human skin for bionic palpation can realize the process of screening and detecting the abnormality of the tissue to be examined. [0003] The long-term reliability of the pressure sensor, temperature and humidity stability, repeatability, zero drift and other static characteristics, the thickness of the sensor and the mechanical properties of the force-sensitive material are all important factors affecting the performance of the pressure sensor. To detect the elastic pressure distribution, an array of the same single pressure sensor is required, and factors such as the homogeneity of each pressure sensor, the uniform...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
Application Information
Patent Timeline
Application Date:The date an application was filed.
Publication Date:The date a patent or application was officially published.
First Publication Date:The earliest publication date of a patent with the same application number.
Issue Date:Publication date of the patent grant document.
PCT Entry Date:The Entry date of PCT National Phase.
Estimated Expiry Date:The statutory expiry date of a patent right according to the Patent Law, and it is the longest term of protection that the patent right can achieve without the termination of the patent right due to other reasons(Term extension factor has been taken into account ).
Invalid Date:Actual expiry date is based on effective date or publication date of legal transaction data of invalid patent.
Login to view more 
Login to view more