A workpiece polishing detection device

Abstract

The invention discloses a workpiece polishing detection device. The workpiece polishing detection device is composed of a support, a polishing head, a cylinder, a detection head, an installation plateand a laser distance measuring instrument. During work, the detection head is fixedly connected to the lower end of a piston of the cylinder, and when the cylinder moves to a lower limiting position,the detection head touches the surface of a measured workpiece to obtain position and posture data; a least square method is adopted to calculate a transformation matrix between a theoretical workpiece coordinate system and a machine tool coordinate system, and a step in which position and posture of the workpiece are adjusted is omitted; the laser distance measuring instrument is located under the polishing head in the Z direction and continuously scans the surface of the workpiece to obtain a polishing track at equal normal-direction intervals, the correctness of coordinate system transformation when the position and posture of the workpiece do not need to be adjusted is verified, the correctness of a numerical control program of polishing at equal normal-direction intervals is verified, and compatibility of the servo capability of the numerical control program of polishing and a machine tool is verified. Through the workpiece polishing detection device, the polishing technology auxiliary time is saved, polishing at equal normal-direction intervals during the polishing technology is ensured, and the reliability of removing through polishing, the controllability of the polishingquality and the polishing technology efficiency are improved.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision optical element polishing, and in particular relates to a workpiece polishing detection device. Background technique [0002] The magnetorheological polishing technology utilizes the high stability of the polishing removal function to achieve precise micro-removal of optical components. It has the advantages of high processing certainty, stable convergence efficiency, controllable edge effects, small subsurface damage layer, and large diameter-thickness ratio. There is no copy effect on the optical mirror surface, which can well meet the ultra-precision processing requirements of optical components in the fields of astronomical optics and strong lasers. For magnetorheologically polished large-diameter optical components, especially optical components with complex shapes and high surface precision such as large-diameter aspheric surfaces, in engineering practice, manual alignment and attitu...

AI Technical Summary

Problems solved by technology

For magnetorheologically polished large-diameter optical components, especially optical components with complex shapes and high surface precision such as large-diameter aspheric surfaces, in engineering practice, manual alignment and attitude adjustment of the polished components is relied on, which takes a long time to assist the process and The clamping accuracy affects the polishing quality and polishing convergence efficiency; when the surface shape of the polished component is finely polished, the difference in the residence time of different positions is caused by the large difference in the amount of polishing removal, and the servo motion of the machine tool requires a large speed and acceleration. The polishing NC program and The servo performance of the actual machine tool does not match, and the large dynamic contour error in the polishing process leads to unstable polishing removal characteristics, resulting in large processing errors, affecting polishing quality and convergence efficiency

The patent application of Suzhou Jiaotu Electronics Co., Ltd. published in the Chinese patent literature database is entitled "A Surface Profile Measurement Method" (CN 105823411 A). The matrix circuit is attached to the curved surface to be measured, and the phase is detected by detecting the matrix circuit. The distance value between two adjacent electric field channels is used to calculate the shape of the original surface to be measured. The measurement accuracy and resolution of this method are limited by the electric field channel of the matrix circuit. There is no benchmark between the surface to be measured and the placement point, so it cannot be used in the polishing process. In-situ posture adjustment and polishing trajectory check

The patent application of Dalian University of Technology published in the China Patent Documentation Database is titled "Online Synergistic Compensation Method for Follow-up and Contour Errors" (CN201610626499.6 A), which estimates and compensates contour errors based on high-precision contour errors in order to improve the accuracy of servo motion. Contour accuracy, but no mention of how to measure and verify the method

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