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Preparation method of metal nano-network flexible panel for electronic information display

A metal nano network, flexible panel technology, applied in metal/alloy conductors, cable/conductor manufacturing, circuits, etc., can solve the problems of high production cost, unmaintainable, complex process, etc.

Active Publication Date: 2018-06-12
(CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, for the preparation of metal nano-network transparent conductive flexible panels, there are mainly the following processes at home and abroad: (1) Use the pressure generated by rolling the rolling bar on the surface of the fixed substrate to disperse the silver nanowires AgNWs dropped on the surface of the substrate to form These AgNWs electrodes can have different densities and surface resistances by controlling the concentration; however, this method cannot keep the force of extrusion during the rolling process unchanged, resulting in uneven distribution of silver nanowires and spreading on the surface after rolling. The liquid film on the surface of the substrate is prone to agglomeration of silver nanowires during the drying process, which increases the contact resistance; (2) Inkjet printing and coffee ring effect are combined to inkjet print silver nanoparticle ink on the substrate to form a line grid. The line width is limited by the size of the nozzle and the size of the silver nanoparticles, but the cost of the processing equipment used in this process is relatively high; (3) grain boundary printing, this process has the disadvantages of complex process and high production cost

Method used

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  • Preparation method of metal nano-network flexible panel for electronic information display
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Embodiment 1

[0029] Such as figure 1 and figure 2 As shown, a method for preparing a metal nano-network flexible panel for electronic information display provided by the present invention comprises the following steps:

[0030] S1, using silicon ceramics as the substrate, placing the substrate in the magnetron sputtering chamber, using Ar ions as the sputtering gas, O 2 As a reaction gas, the radio frequency power supply acts on the cathode, and the preparation temperature is kept at room temperature; the sputtering power is 250W, the working pressure is 0.5Pa, the target voltage is 87V, and the distance between the substrate and the target is 70mm, and the prepared SiO 2 A sacrificial layer with a film thickness of 300nm.

[0031] S2, using magnetron sputtering method, on SiO 2 GZO film was prepared on the film as a cover layer, GZO ceramic target was used, Ar ions were used as sputtering gas, DC power was applied to the cathode, sputtering power was 300W, working pressure was 0.2Pa, ...

Embodiment 2

[0040]A method for preparing a metal nano-network flexible panel for electronic information display provided by the present invention comprises the following steps:

[0041] S1, using silicon ceramics as the substrate, placing the substrate in the magnetron sputtering chamber, using Ar ions as the sputtering gas, O 2 As a reaction gas, the radio frequency power supply acts on the cathode, and the preparation temperature is kept at room temperature; the sputtering power is 250W, the working pressure is 0.5Pa, the target voltage is 87V, and the distance between the substrate and the target is 70mm, and the prepared SiO 2 A sacrificial layer with a film thickness of 300nm.

[0042] S2, using magnetron sputtering method, on SiO 2 The AZO film was prepared on the film as a cover layer, using AZO ceramic target material, Ar ions as sputtering gas, DC power supply on the cathode, sputtering power of 350W, working pressure of 0.2Pa, target voltage of 441V, flexible panel substrate an...

Embodiment 3

[0051] A method for preparing a metal nano-network flexible panel for electronic information display provided by the present invention comprises the following steps:

[0052] S1, using silicon ceramics as the substrate, placing the substrate in the magnetron sputtering chamber, using Ar ions as the sputtering gas, O 2 As a reaction gas, the radio frequency power supply acts on the cathode, and the preparation temperature is kept at room temperature; the sputtering power is 250W, the working pressure is 0.5Pa, the target voltage is 87V, and the distance between the substrate and the target is 70mm, and the prepared SiO 2 A sacrificial layer with a film thickness of 300nm.

[0053] S2, using magnetron sputtering method, on SiO 2 The ZnO thin film was prepared on the thin film as the covering layer, ZnO ceramic target was used, Ar ions were used as the sputtering gas, DC power was applied to the cathode, the sputtering power was 400W, the working pressure was 0.2Pa, the target v...

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Abstract

The invention relates to a preparation method of a metal nano-network flexible panel for electronic information display. The method includes the following steps that a SiO2 thin film is prepared on asilicon slice as a sacrificial layer; a GZO thin film, an AZO thin film or a ZnO thin film are prepared on the sacrificial layer as a covering layer; diluted HNO3 is dropped on the covering layer, thecovering layer is corroded to obtain cracks between particles; then HF is dropped to corrode the SiO2 thin film under the cracks between the particles; an Ag metal thin film is produced by sputtering; the GZO thin film is removed by HCI immersion, HF immersion is carried out to remove the SiO2 thin film to obtain a metal Ag nano-network; the metal Ag nano-network is transferred to a PET flexibletransparent substrate coated with EVA optical cement to obtain a metal Ag nano-network transparent conductive flexible panel. The preparation method has the advantages that on the basis of preparing the large-particle GZO thin film, AZO thin film or ZnO thin film, combined with magnetron sputtering and wet etching, the metal nano-network transparent conductive flexible panel is obtained, wherein the metal nano-network structure is easy to regulate and the manufacture is simple and convenient.

Description

technical field [0001] The invention relates to the technical field of flexible panel processing, in particular to a method for preparing a metal nano-network flexible panel for electronic information display. Background technique [0002] High-performance transparent electrodes are essential in many optoelectronic devices, such as touch screens, photovoltaic cells, optoelectronic detectors, photovoltaic devices, thin film (photo) transistors, liquid crystal displays, sensors, thermal reflectors, etc. At present, transparent conductive electrodes generally use metal oxides, such as ITO films, but the key metal element indium in ITO oxide electrodes has limited reserves. With the popularity of products such as liquid crystal displays and touch screens, the price of indium has risen sharply. At the same time, indium tin oxide transparent electrodes lack flexibility, are not easy to bend, and have poor chemical stability, so they are not suitable for flexible transparent electr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B13/00H01B1/02
Inventor 彭寿仲召进马立云倪嘉韩娜崔介东操芳芳王萍萍高强赵凤阳曹欣单传丽石丽芬王巍巍
Owner (CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD
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