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A kind of preparation method of mid-wave infrared medium-enhanced metal high-reflection film

A high-reflection film and enhanced film technology, applied in mirrors, instruments, optics, etc., can solve the problems of low environmental reliability of metal films

Active Publication Date: 2020-05-01
LUOYANG INST OF ELECTRO OPTICAL EQUIP OF AVIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems existing in the prior art, the present invention proposes a method for preparing a medium-wave infrared medium-enhanced metal high-reflection film, which aims to solve the problem of low environmental reliability of the metal film, realize the preparation of a reflective film with a very high reflectivity, and improve the reflection Improve the environmental reliability of the mirror and extend the service life of the mirror

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] The preparation method of the mid-wave infrared medium-enhanced metal high-reflection film in this embodiment includes the following steps:

[0028] Step 1: Soak the absorbent cotton with a mixture of alcohol and ether to clean the mirror to remove surface debris, oil and accessories;

[0029] Step 2: Fix the reflector to the fixture, place the vacuum chamber, and evacuate it. When the pressure in the chamber is 1.8×10 - 2 Pa, heat the substrate to 150°C and keep it warm for 30min;

[0030] Step 3: bombard the mirror with APS source for 6 minutes;

[0031] Step 4: Evaporate the bonding layer silicon monoxide, the vacuum chamber pressure is 4.5×10 -3 Pa, the evaporation rate is 0.5~1.5nm / s, the thickness of the film layer is monitored by the crystal oscillator method, and the thickness is 120nm;

[0032] Step 5: Turn off the heater in the vacuum chamber, cool naturally, evaporate aluminum when the temperature is lower than 50°C, the evaporation rate is 3-10nm / s, the ...

Embodiment 2

[0040] The preparation method of the mid-wave infrared medium-enhanced metal high-reflection film in this embodiment includes the following steps:

[0041] Step 1: Soak the absorbent cotton with a mixture of alcohol and ether to clean the mirror to remove surface debris, oil and accessories;

[0042] Step 2: Fix the reflector to the fixture, place the vacuum chamber, and evacuate it. When the pressure in the chamber is 1.5×10 - 2 Pa, heat the substrate to 150°C and keep it warm for 30min;

[0043] Step 3: bombard the mirror with APS source for 7 minutes;

[0044] Step 4: Evaporate the bonding layer silicon monoxide, the vacuum chamber pressure is 4.2×10 -3 Pa, the evaporation rate is 0.5~1.5nm / s, the thickness of the film layer is monitored by the crystal oscillator method, and the thickness is 140nm;

[0045] Step 5: Turn off the heater in the vacuum chamber, cool naturally, evaporate aluminum when the temperature is lower than 50°C, the evaporation rate is 3-10nm / s, the ...

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Abstract

The invention discloses a method for preparing a medium wave infrared medium-enhanced metal high-reflective film. Through deposition of a multilayer high-hardness medium film on a metal surface, the preparation method solves the problem of low reliability of a metal film environment, realizes preparation of a reflecting film with extremely high reflectivity, improves environment reliability of a reflector, and prolongs the service life of the reflector. The method adopts an electron beam evaporation film layer, first a bonding layer is evaporated on the surface of the reflector, then a metal reflecting layer is evaporated, and finally, a multilayer high-hardness medium-enhanced film is deposited. According to the method, the multilayer high-hardness medium-enhanced film is deposited on thesurface of a metal film, the reflectivity of the reflector is improved, and the environment reliability of the reflector is also improved. The average reflectivity of the reflector prepared by adoption of the invention in wavebands of 3 to 5 [mu]m is 99.5%, and the environment reliability of the plated reflecting film meets the national military standard for optimal thin films.

Description

technical field [0001] The invention relates to the technical field of thin film manufacturing of optical parts, in particular to a method for preparing a medium-wave infrared medium-enhanced metal high-reflection film. Background technique [0002] In order to reduce the size and weight of optoelectronic products, folding mirrors are widely used in optical systems. Due to the wide reflection bandwidth of the refracting mirror in the mid-wave infrared optical system, the traditional multilayer dielectric film has many layers, thick film layers, and complex deposition processes; while the metal reflective film is usually used, there are problems of aluminum, silver and gold. The material of the metal reflective film is soft and easy to damage, so a protective film needs to be coated on the outside of the metal film; a single protective film improves the environmental reliability of the metal reflective film, but it will reduce the reflectivity of the metal film. [0003] Con...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/08G02B1/14
CPCG02B1/14G02B5/0808
Inventor 马丽惟贺建良
Owner LUOYANG INST OF ELECTRO OPTICAL EQUIP OF AVIC