Wide-range electron beam excited fluorescence imaging and spectral measurement device and method thereof

Abstract

The invention discloses a wide-range electron beam excited fluorescence imaging and spectral measurement device and a method thereof. The wide-range electron beam excited fluorescence imaging and spectral measurement device comprises a electron microscope scanning system, a scanning signal generator, a wide-range fluorescence collecting, coupling and transmitting system, a fluorescence intensity detector, a fluorescence spectral detector, a synchronous scanning signal collector and a cooperative control and data processing output system. Since a wide-range fluorescence coupler is introduced, fluorescence signals excited within an imaging view field by the microscope scanning system can be converged and coupled to a fluorescence transmission light path with high collection efficiency, the problems that, to images acquired by wide-range fluorescence scanning imaging, it is difficult to calculate and compare fluorescence excitation intensity or fluorescence yield and fluorescence spectruminformation of different positions according to uniform standards are solved, and wide-range rapid detection and analysis on the basis of electron beam excited fluorescence signals can be completed.

Description

technical field [0001] The invention relates to electron beam excited fluorescence signal detection and processing technology, in particular to a large-scale electron beam excited fluorescence imaging and spectrum measuring device and method thereof. Background technique [0002] The fluorescent signal excited by the electron beam refers to the electromagnetic waves emitted by the electron beam in the ultraviolet, infrared or visible light band except for secondary electrons, backscattered electrons, Auger electrons and X-rays when the electron beam bombards the surface of the material; The basic principle is that the electrons inside the material are excited by the incident electrons to a high-energy state, and after a certain relaxation time, they transition back to a low-energy state and release energy, and part of the energy is emitted in the form of electromagnetic radiation. The physical process of a material producing fluorescence under electron beam excitation is det...

AI Technical Summary

Problems solved by technology

If the collection efficiency of fluorescence intensity at each position is not uniform under a large-scale field of view, that is, under the large-scale electron beam scanning imaging in a scanning electron microscope, it cannot meet the required fluorescence imaging analysis requirements

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