High piezoelectric polarization system for macromolecule thin film

A polymer film and polarization system technology, applied in the field of high-voltage electric polarization system, can solve the problems of not being able to produce on a large scale, low polarization efficiency, and inconsistency in the crystal direction of β, and achieve large-scale production and production pass rate High, simple structure effect

Active Publication Date: 2018-08-31
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the polarized electrodes used at home and abroad are generally flat-probe type, that is, the lower electrode is a metal flat plate, which plays the role of supporting the film during the polarization process, and the upper electrode is a needle-point electrode, but the polarization efficiency of this method is relatively low. Low, the distribution of electric field intensity is uneven, and the diaphragm is broken down and the rate of damage is relatively low during polarization, and there will be problems such as inconsistency in the direction of the β-direction crystal, which will eventually affect the piezoelectric parameters of the film
[0006] The traditional polarization method has the disadvantages that the production pass rate of the polarization method is low, and it is basically impossible to produce on a large scale. The present invention provides a high-voltage electric polarization system for polymer films that can solve the disadvantages of traditional polarization.

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  • High piezoelectric polarization system for macromolecule thin film

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Effect test

specific Embodiment approach 1

[0013] Embodiment 1: In this embodiment, a high-voltage electric polarization system for polymer films is composed of a high-voltage polarization power supply 1, a high-voltage electrode 2, a polarization electric field assembly, a film polarization assembly, and a heating device 8; the polarization The electric field component is composed of a polarized plate upper electrode 3 and a polarized plate lower electrode 7; the high voltage polarized power supply 1 is externally connected with a high voltage electrode 2, and the thin film polarized component is composed of a main polarized silicon chip 4 and a bottom plate polarized silicon The high-voltage electrode 2 is located above the upper electrode 3 of the polarized plate, and the main polarized silicon chip 4, the bottom polarized silicon chip 6, and the lower electrode of the polarized plate are arranged in sequence below the upper electrode 3 of the polarized plate. 7 and a heating device 8, the sample to be polarized 5 is...

specific Embodiment approach 2

[0016] Embodiment 2: This embodiment is different from Embodiment 1 in that: the main polarized silicon wafer 4 is selected according to the shape of the polarized region. Others are the same as the first embodiment.

[0017] The main polarized silicon wafer 4 is processed by photolithography to process the polarized regions of the main polarized silicon wafer into different shapes, which can realize the patterning of the polarized regions of the sample.

[0018] The photolithography process is to etch outside the designed polarization area.

specific Embodiment approach 3

[0019] Embodiment 3: This embodiment differs from Embodiment 1 or Embodiment 2 in that: the high-voltage polarized power supply 1 is an adjustable DC voltage of 0-5000V. Others are the same as those in Embodiment 1 or 2.

[0020] The material of the conductive metal flat plate is any material.

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Abstract

The invention relates to a high piezoelectric polarization system for a macromolecule thin film, belongs to the field of ordered orientation of a macromolecule piezoelectric material, and particularlyrelates to a high piezoelectric polarization system for the macromolecule thin film. By the high piezoelectric polarization system, directional consistent and uniform distribution of Beta-direction crystals after polarization of a sample to be polarized is effectively ensured, a sample polarization region is versatile in morphology, the problem that a sample is broken down to cause reduction of afinished rate due to excessive high single field intensity in single-point corona polarization is prevented, so that the polarization finished rate is effectively improved. The polarization system comprises a high-voltage polarization power supply, a high-voltage power supply, a polarization electric field assembly, a thin film polarization assembly and a heating device, wherein the polarizationelectric field assembly comprises a polarization panel upper electrode and a polarization panel lower electrode, and the thin film polarization assembly comprises a main polarization silicon wafer anda bottom plate polarization silicon wafer. The high piezoelectric polarization system is used for producing the macromolecule polarization thin film.

Description

technical field [0001] The invention belongs to the field of ordered orientation of polymer piezoelectric materials, and in particular relates to a high-voltage electric polarization system for polymer films. Background technique [0002] Polymer piezoelectric materials are widely used in aerospace, electronics, medical and other fields. Compared with traditional piezoelectric materials, polymer piezoelectric materials are flexible materials that can be made into different shapes according to application needs. Widespread attention. [0003] Since the polarization directions of most crystal regions of polymer piezoelectric materials are random, the film as a whole does not have spontaneous polarity. Therefore, it must be polarized to make the whole film have spontaneous polarization, so that the film can produce piezoelectric effect when it is subjected to external force or deformation in a certain direction, so increasing the content of β-type crystals inside the film is i...

Claims

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Application Information

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IPC IPC(8): H01L41/047H01L41/29
CPCH10N30/87H10N30/06
Inventor孙权张旭覃双崔洪亮刘兴宇徐兴烨邵志强张鹏
OwnerNO 49 INST CHINESE ELECTRONICS SCI & TECH GRP