Wide-spectrum correction method for measuring response of photoelectric detector by using FTIR (Fourier Transform infrared spectroscopy)

A technology of photodetector and calibration method, which is applied in the field of wide-spectrum calibration, can solve problems such as limitation, difficulty in continuous band connection, difficulty in single temperature simulation, etc., and achieves the effect of convenient operation

Active Publication Date: 2018-09-04
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example: for the calculation instrument function correction method, using the black body radiation formula to simulate the output of the infrared light source, it is necessary to set a black body radiation temperature, so that the infrared light source is not an ideal black body with a single temperature, and the setting of this temperature is artificial. It is not obtained through actual measurement. On the other hand, the temperature of the actual infrared light source must have a distribution range, which is difficult to simulate with a single temperature; in addition, the response characteristics of the beam splitter required for the calculation of the instrument function correction method are not actually measured, and these are inevitably introduced. certain error
Another example: the basis of the standard detector transfer correction method is based on the calibrated standard detector, so the correction range can only be limited within the response range of the standard detector, and different wave bands require different standard detectors. The connection is also difficult, which limits the application in many occasions

Method used

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  • Wide-spectrum correction method for measuring response of photoelectric detector by using FTIR (Fourier Transform infrared spectroscopy)
  • Wide-spectrum correction method for measuring response of photoelectric detector by using FTIR (Fourier Transform infrared spectroscopy)
  • Wide-spectrum correction method for measuring response of photoelectric detector by using FTIR (Fourier Transform infrared spectroscopy)

Examples

Experimental program
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Effect test

Embodiment 1

[0021] Example 1: Wavelength Extended InGaAs Detector

[0022] Such as image 3 As shown in the lower part, the original photocurrent spectrum test is carried out for a wavelength extended InGaAs detector with existing standard spectral data, and the response spectrum correction is carried out by using the correction method of the present invention. The long-wave cut-off wavelength of this device is about 2.5 μm. It is a front light-incoming detector, and the response of the short-wave end extends to the visible light band. Therefore, a combination of a tungsten-halogen lamp (white light) light source and a quartz beam splitter is used in the measurement to make the spectrometer more efficient. Strong short-wave output, thus covering a wide spectral range from mid-infrared short-wave end to visible light. Under fixed aperture and gain parameters, first change the scanning speed (such as 0.1581cm / s to 1.8988cm / s, a total of 7 files) to measure a set of original background spec...

Embodiment 2

[0023] Embodiment 2: Si detector

[0024] Such as image 3 As shown in the upper part, the original photocurrent spectrum test is carried out for a Si detector with existing standard spectral data, and the response spectrum correction is carried out by using the correction method of the present invention. The long-wave cut-off wavelength of this detector is about 1 μm, and the response of the short-wave end extends to the visible light band. Therefore, the combination of the halogen tungsten lamp (white light) light source and the quartz beam splitter is still used in the measurement, so that the spectrometer has a strong Shortwave output. Under fixed aperture and gain parameters, first change the scanning speed (such as 0.1581cm / s to 1.8988cm / s7 files) to measure a set of original background spectra (such as figure 1Shown), in order to ensure data quality, more scan times (such as 64 times) can be used during measurement; for detector measurement, since it generally does no...

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Abstract

The invention discloses a wide-spectrum correction method for measuring the response of a photoelectric detector by using FTIR (Fourier Transform infrared spectroscopy). According to the method, basedon a wide-spectral range flat-response pyroelectric detector which is adopted as a standard configuration for an FTIR spectrometer, the response of the detector and an amplification circuit to a selected light source and beam splitter combination at different scanning speeds is obtained; and relevant data are extracted, and the frequency response characteristics of the detector and the amplification circuit are obtained by means of fitting; the frequency response characteristics are used to correct the original output characteristic of the particular light source and beam splitter combination, so that the actual output characteristic of the particular light source and beam splitter combination can be obtained; with the corrected actual output characteristic adopted as a background spectrum, reference operation can be performed on the measured original response spectrum of a photoelectric detector, so that the corrected actual response spectrum of the photoelectric detector can be obtained; since the pyroelectric detector is a standard configuration for the FTIR spectrometer has a wide-spectral response property, and therefore, the method is universal and broad-spectrum, and is suitable for different light source and beam splitter combinations in various FTIR spectrometers.

Description

technical field [0001] The invention belongs to the field of semiconductor optoelectronic spectroscopy, and specifically relates to a universal method for correcting the response of a photodetector measured by a Fourier transform infrared (FTIR) spectrometer in a wide spectral range. Background technique [0002] Semiconductor photodetectors (PDs) and their focal plane arrays (FPAs) have important applications in many fields, and their response spectra are of great concern in all these applications. Conventional PD or FPA has a continuous response wavelength range, within which the size of the response will change, that is, the responsivity has a spectral distribution, this spectral distribution or response spectrum needs to be obtained through actual measurement, and has a series of advantages The Fourier transform infrared (FTIR) spectrometer has become the instrument of choice for measuring PD or FPA devices, especially in the infrared band. [0003] Although the photocu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28G01J5/00
CPCG01J3/28G01J3/2803G01J5/00G01J5/80
Inventor 张永刚邵秀梅张忆南李雪龚海梅方家熊
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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