A 5-layer composite quartz crucible for large-scale integrated circuits and its preparation method and surface treatment method

Abstract

The invention discloses a five-layer composite quartz crucible for a large-scale integrated circuit and a preparation method and surface treatment method thereof, and belongs to the technical field ofquartz crucible processing and treatment. The five-layer composite quartz crucible is composed of five layers of quartz, the thickness is decreased successively from outside to inside, and the five layers of quartz include outer layer natural quartz, inner layer natural quartz, semi-crystalline quartz, microcrystalline synthetic quartz and inner layer synthetic quartz successively, the outer layer natural quartz and inner layer natural quartz are both made from high bubble natural quartz, the semi-crystalline quartz is made from low bubble quartz, and no bubbles are in the microcrystalline synthetic quartz and the inner layer synthetic quartz; the microcrystalline synthetic quartz contains 0.15% of mixed rare earth which is lanthanum-cerium mixed rare earth, the inner layer synthetic quartz contains 0.11% of biphasic toughening copolymer, and the diphasic toughening copolymer includes the following components of: Ni, Mn, N, Cu, Ag, Co and Fe. The problems of large internal stress, poor temperature resistance and low service life of a quartz crucible in the prior art are solved.

Description

technical field [0001] The invention relates to a quartz crucible, a preparation method and a surface treatment method thereof, in particular to a 5-layer composite quartz crucible for large-scale integrated circuits, a preparation method and a surface treatment method thereof, and belongs to the technical field of quartz crucible processing. Background technique [0002] Quartz crucible is an essential raw material for controlling single crystal silicon used in large-scale integrated circuits. Quartz crucible can be used below 1450°C. It is in the melting stage at 1450°C and in the crystal pulling stage at 1425°C. It can be divided into transparent and opaque. , the traditional quartz crucible uses natural quartz and synthetic quartz to solve the problems of bubble degree and transparency respectively. However, since natural quartz stone has a crystal structure, it is a trigonal crystal system at room temperature and a tetrahedral structure. Its melting point is 1730°C-1750°...

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Problems solved by technology

[0003] The main purpose of the present invention is to provide a 5-layer composite quartz crucible for large-scale integrated circuits and its preparation method and surface treatment method to solve the large internal stress, poor temperature resistance and low service life of quartz crucibles in the prior art. The problem

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