Production process of electronic-grade hydrochloric acid

A production process, electronic-grade technology, applied in the production process of electronic-grade hydrochloric acid, can solve the problems of wasting resources, polluting the environment, and small production volume, and achieve the effect of recycling resources and avoiding environmental pollution

Inactive Publication Date: 2018-10-02
成都市科隆化学品有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantages of this process are: (1) the introduction of tin while removing free chlorine gas will easily cause fine particles to exceed the standard, and it is difficult to reach the standard of electronic grade hydrochloric acid; (2) the production volume is very small, and it is b

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] This embodiment provides a production process for electronic grade hydrochloric acid. This process does not introduce new impurities while reducing free chlorine, and reasonably treats or uses waste gas or impurities generated during the production process to avoid environmental pollution and achieve reasonable resource utilization. use. It includes the following steps:

[0029] Step 1: Take industrial hydrochloric acid, put it in a reaction kettle, add hydrazine hydrate to it, seal the reaction, and then stir the materials until the reaction is complete.

[0030] Step 2: Import all the reacted materials into the deacidification tower, maintain negative pressure in the deacidification tower, and pass air into the deacidification tower to stir the solution by bubbling, blowing and deabsorbing, and obtain escaped gas and tower bottom liquid .

[0031] Step 3: Compress the escaping gas desorbed in the deacidification tower with a compressor.

[0032] Step 4: Lead the co...

Embodiment 2

[0034] This embodiment provides a production process for electronic grade hydrochloric acid. This process does not introduce new impurities while reducing free chlorine, and reasonably treats or uses waste gas or impurities generated during the production process to avoid environmental pollution and achieve reasonable resource utilization. use. It includes the following steps:

[0035] Step 1: Take 1000L of industrial hydrochloric acid, put it in a reaction kettle, add 50mL of hydrazine hydrate with a mass concentration of 60% to it, then seal the reaction kettle, and stir the materials until they are completely reacted.

[0036] Step 2: All the reacted materials are introduced into the deacidification tower, the air pressure in the deacidification tower is maintained at 0.05MPa, air is passed into the deacidification tower to stir the solution by bubbling, blowing and deabsorbing, and the escaped gas and the bottom of the tower are obtained. liquid.

[0037] Step 3: Compres...

Embodiment 3

[0040] This embodiment provides a production process for electronic grade hydrochloric acid. This process does not introduce new impurities while reducing free chlorine, and reasonably treats or uses waste gas or impurities generated during the production process to avoid environmental pollution and achieve reasonable resource utilization. use. It includes the following steps:

[0041] Step 1: Take 1000L of industrial hydrochloric acid, put it in a reaction kettle, add 100mL of hydrazine hydrate with a mass concentration of 50% to it, then seal the reaction kettle, and stir the materials until they are completely reacted.

[0042] Step 2: All the reacted materials are introduced into the deacidification tower, the air pressure in the deacidification tower is maintained at 0.08MPa, air is passed into the deacidification tower to stir the solution by bubbling, blowing and deabsorbing, and the escaped gas and the bottom of the tower are obtained. liquid. Collect the bottom liqu...

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PUM

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Abstract

The invention discloses a production process of electronic-grade hydrochloric acid and relates to the technical field of chemical engineering. The production process of electronic-grade hydrochloric acid comprises the following steps: industrial-grade hydrochloric acid is placed in a reaction kettle, hydrazine hydrate is added to the reaction kettle, and the substances are stirred and mixed untilsufficient reaction; the material obtained after reaction is totally guided into a deacidification tower, negative pressure is maintained in the deacidification tower, air is introduced into the deacidification tower for bubbling stirring and blowing desorption of a solution, and escape gas and a tower bottom solution are obtained; the desorbed escape gas in the deacidification tower is compressedby a compressor; compressed escape gas enters an acid pickling tower for acid pickling, electronic-grade hydrochloric acid is obtained, non-condensable gas returns to the bottom of the deacidification tower for bubbling circulation, and negative pressure is maintained in the acid pickling tower. According to the production process of electronic-grade hydrochloric acid, new impurities are not introduced during reduction of free chlorine, waste gas or impurities produced in the production process is/are reasonably treated or applied, environmental pollution is avoided, and reasonable utilization of resources is realized.

Description

technical field [0001] The invention relates to the technical field of chemical industry, in particular to a production process of electronic grade hydrochloric acid. Background technique [0002] Ultra-pure electronic grade chemical reagents, also known as process chemicals, or wet chemicals, are one of the key basic chemical materials in the process of VLSI fabrication. Ultra-pure electronic grade hydrochloric acid is one of them, and it has been widely used in the production of semiconductor components, assembly of VLSI, and cleaning and corrosion during processing. In recent years, with the miniaturization of integrated circuits and the high-speed processing, more stringent requirements have been put forward for the purity of electronic-grade hydrochloric acid; the purity of electronic-grade hydrochloric acid has been developed from the ppm level of single cation content to Current ppb level. [0003] Ultrapure electronic grade hydrochloric acid is usually prepared fro...

Claims

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Application Information

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IPC IPC(8): C01B7/07C01B7/01
CPCC01B7/012C01B7/0706
Inventor 张松刘增林赵绍益刘贵明罗培祥李霞常全王怀范秀君周涛钟建芳钟洪英谢根珍张友清张军孙茂成曾召秀
Owner 成都市科隆化学品有限公司
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