Recycling and reuse method for lithium tantalite black sheets
A technology of lithium tantalate to lithium tantalate, applied in the field of crystal post-processing, can solve the problems of increasing operating costs and low efficiency, and achieve the effects of reducing production costs, ensuring piezoelectricity and monodomain properties, and achieving significant economic benefits.
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preparation example Construction
[0031] In the preparation process of lithium tantalate black sheet, because it is carried out in a reducing atmosphere, oxygen diffuses outward from the crystal, which increases the concentration of oxygen vacancies, and the oxygen vacancies obtain an electron to form an F color center (F+), which enhances the electrical conductivity. Rate. The color center absorbs strongly in the visible light region, making the chip black. At the same time, the valence of some Ta ions changes from +5 to +4, and the electron carriers increase accordingly, so the resistivity decreases.
[0032] On the contrary, the present invention can fill the oxygen vacancy in the lithium tantalate black sheet by oxidizing the unqualified lithium tantalate black sheet in an oxidizing atmosphere. The valency of the Ta ions therein was changed from +4 to +5, again to a conventional "white" wafer.
[0033] In this method, unqualified lithium tantalate black chips are oxidized, also known as "whitening" treat...
Embodiment 1
[0035] Embodiment 1: blackening inhomogeneous lithium tantalate black sheet, color is too black (resistivity is generally lower than 10 10 Ω.cm) lithium tantalate black sheet, the color is too light (resistivity is generally higher than 10 11 Ω.cm) Lithium tantalate black pieces are loaded into quartz boats in turn, and put into a heat treatment furnace, vacuumed to below 100Pa; filled with oxygen to an atmospheric pressure; unqualified tantalum to be treated at a rate of 80 ° C / h The lithium tantalate black sheet was heated from room temperature to 600°C; kept at the holding temperature for 24 hours; after the holding temperature was completed, it was cooled to room temperature at a rate of 80°C / h to obtain a lithium tantalate white sheet with a resistivity of about 1×10 14 Ω.cm; after blackening treatment again, the required qualified lithium tantalate black sheet is obtained.
Embodiment 2
[0036] Embodiment 2: blackening inhomogeneous lithium tantalate black sheet, color is too black (resistivity is generally lower than 10 10 Ω.cm) lithium tantalate black sheet, the color is too light (resistivity is generally higher than 10 11 Ω.cm) Lithium tantalate black slices are loaded into quartz boats in turn, and put into a heat treatment furnace, vacuumed to below 100Pa; filled with oxygen to an atmospheric pressure; unqualified tantalum to be treated at a rate of 90 ° C / h Heating the lithium tantalate black sheet from room temperature to 600°C; keeping it at the holding temperature for 60 hours; after the holding temperature, cooling to room temperature at a rate of 90°C / h to obtain a lithium tantalate white sheet with a resistivity of about 6×10 14 Ω.cm; after blackening treatment again, the required qualified lithium tantalate black sheet is obtained.
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Abstract
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