A kind of micro spring processing equipment and preparation method thereof

Abstract

The invention relates to a micro spring processing equipment and a preparation method thereof, including a shell frame assembly, a vacuum device, a spring wire lifting assembly, a spring winding device, a heating forming and cutting device, and a standing device. The invention also relates to a micro spring processing method. The beneficial effects obtained are as follows: 1. All winding processes are completed in vacuum, avoiding the oxidation of tungsten-rhenium alloy in an aerobic environment at high temperature; 2. By straightening the spring wire at a certain temperature, it makes The spring wire remains straight before winding; 3. The tension of the spring wire is controlled by the torque limiter to ensure the winding effect; 4. The spring wire in the coil and after coiling is further heated by the heating device. Heat treatment to improve the performance of the coiled spring. 5. After the spring winding is completed, the spring is fixed by the setting device to improve the stability of the spring. 6. A new cut-off device is adopted, which will not affect the shape of the spring.

Description

Technical field [0001] The present invention relates to a winding process of a wire, and in particular, to a micro spring process. Background technique [0002] In recent years, with the continuous development and maturity of microelectromechanical systems (MEMS: Micro-Electro-MeChanicalsystems technology, micro-system applications such as microelectronic equipment and micro-sensor have been expanded, and it has been widely used in civil, medical, military and other fields. . The study of needle microelectrod based on micro-machined processes has developed rapidly. The microelectrode structure mainly has a flat micro-electrode and a heterogeneous microelectrode and a microelectrode that assembles the planar microelectrode into a array shape, and the microelectrodes of these different structures have their own characteristics. Although there are a variety of different forms, the electrode needles are all monolithic, such as the implantable multi-function microneedle array brain el...

AI Technical Summary

Problems solved by technology

Although the traditional electrodes have many different forms, the electrode needles are all in a single body, such as an implantable multifunctional microneedle array brain electrode disclosed in patent CN201621050204. The implantable brain electrodes used in the primary visual cortex of the mouse brain are all integral electrodes. Once the processing is completed, the electrode wires cannot be adjusted separately.

The adjustable electrode can realize the individual adjustment of each electrode wire through the micro spring, but because the diameter of the electrode wire is small (15 micron-50 micron), the force on the electrode is also small during the implantation process, so it is not suitable for adjustable electrodes. The size, precision and accuracy of the spring of the electrode have very high requirements, and the springs currently on the market cannot meet such requirements

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