A preparation method of a silicon-based microneedle array patch

Abstract

A preparation method of a silicon-based microneedle array patch is disclosed. The method includes S.1) coating the back of a silicon wafer with a photoresist; S.2) baking the silicon wafer; S.3) photoetching, exposing, and developing to prepare a hole array; S.4) performing deep silicon etching to form deep holes in the silicon wafer; S.5) covering the front surface of the silicon wafer with an aluminum film layer through electron beam evaporation; S.6) coating the front surface of the silicon wafer with the photoresist; S.7) baking the silicon wafer; S.8) photoetching, exposing, and developing to prepare a photoresist cylinder array; S.9) immersing the silicon wafer into an aluminum corrosive liquid to remove the excess aluminum film, and rinsing; S.10) performing deep silicon etching toobtain a silicon needle tip blank array, with aluminum being adopted as an etching template; S.11) removing the photoresist and the aluminum film; and S.12) immersing the silicon wafer into a corrosive liquid to obtain a silicon-based microneedle array. Beneficial effects of the method are that (1) a preparation process is greatly simplified and processing is simple; (2) micropores deviate from the centers of needle tips and piecing capability is enhanced; and (3) subsequent secondary processing can be performed conveniently.

Description

technical field

[0001] The invention relates to a microneedle, in particular to a method for preparing a silicon-based microneedle array patch. Background technique

[0002] (1) Injection is an important method and way of modern medical diagnosis. Through injection, people can perform various medical procedures such as administering drugs, adding loads, extracting tissues, and monitoring body fluids. Traditional injection is a tense and painful process, which often causes discomfort to patients. At the same time, needles can also cause damage to organs and skin, cross-infection and other problems. In the past ten years, people have proposed the concept of microneedles in order to solve the dilemma of syringes. The percutaneous micro-injection / sampling method of the microneedle effectively reduces the metabolic burden of the liver / digestive tract, liver injury toxicity, cross-infection and other problems. Moreover, the injection and extraction of microneedles are simple an...

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